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New designs of hydrophobic and mesostructured Ultra Low k materials with isolated mesopores

Published online by Cambridge University Press:  22 June 2011

Anthony Grunenwald
Affiliation:
Institut Européen des Membranes, CNRS-ENSCM-UM2, Université Montpellier 2, CC 047, 2 Place Eugène Bataillon, 34095 Montpellier Cedex 5, France
André Ayral
Affiliation:
Institut Européen des Membranes, CNRS-ENSCM-UM2, Université Montpellier 2, CC 047, 2 Place Eugène Bataillon, 34095 Montpellier Cedex 5, France
Pierre Antoine Albouy
Affiliation:
Laboratoire de Physique des Solides, UMR CNRS8502, Bât. 510, F91405 Orsay, France
Vincent Rouessac
Affiliation:
Institut Européen des Membranes, CNRS-ENSCM-UM2, Université Montpellier 2, CC 047, 2 Place Eugène Bataillon, 34095 Montpellier Cedex 5, France
David Jauffres
Affiliation:
SIMAP-INPG, 1130 rue de la Piscine -BP 75 -F-38402 St Martin d’Hères cedex, France
Marc Verdier
Affiliation:
SIMAP-INPG, 1130 rue de la Piscine -BP 75 -F-38402 St Martin d’Hères cedex, France
Patrice Gergaud
Affiliation:
CEA-LETI-MINATEC Campus, 17 rue des martyrs, 38054 Grenoble, cedex 09, France
Christophe Licitra
Affiliation:
CEA-LETI-MINATEC Campus, 17 rue des martyrs, 38054 Grenoble, cedex 09, France
Aziz Zenasni
Affiliation:
CEA-LETI-MINATEC Campus, 17 rue des martyrs, 38054 Grenoble, cedex 09, France
Vincent Jousseaume
Affiliation:
CEA-LETI-MINATEC Campus, 17 rue des martyrs, 38054 Grenoble, cedex 09, France
Jean-Paul Simon
Affiliation:
SIMAP-INPG, 1130 rue de la Piscine -BP 75 -F-38402 St Martin d’Hères cedex, France
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Abstract

In this work, hydrophobic mesostructured organosilica thin films, exhibiting isolated mesopores (~ 7 nm), have been successfully deposited by spin-coating using different polystyrene-block-polyethylene oxide copolymers (PS-b-PEO) as structure-directing agents and methyltriethoxysilane (MTES) as organosilica precursor. Different ordered mesostructures (Face Centered Cubic, 2D or 3D Hexagonal and Body Centered Cubic) can be achieved by controlling different synthesis parameters. X-Ray Diffraction (XRD) and Grazing Incidence Small Angle X-Ray Scattering (GISAXS) techniques were used to investigate the mesostructure evolution through thermal and UV treatments. Swelling and shrinkage were evidenced by in-situ XRD and X-Ray Reflectivity measurements during the thermal removal of the meso-templates. Infrared spectroscopy and 29Si NMR were additionally used to investigate the microstructure evolution. The film porosity was estimated thanks to Ellipsometry Porosimetry (EP). Correlation between mechanical properties through nanoindentation measurements and the mesostructure ordering is discussed as well as assessments of the dielectric constant k by mercury contact probe.

Type
Research Article
Copyright
Copyright © Materials Research Society 2011

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References

1. Miyoshi, H., Matsuo, H., Tanaka, H., Yamada, K., Oku, Y., Takada, S., Hata, N. and Kikkawa, T., Japan. J. Appl. Phys. 44, 1161 (2005).CrossRefGoogle Scholar
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5. Grunenwald, A., and Ayral, A., Micro. Meso. Mat. (submitted)Google Scholar
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New designs of hydrophobic and mesostructured Ultra Low k materials with isolated mesopores
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