Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-17T19:25:29.363Z Has data issue: false hasContentIssue false
  • English
  • Français

Near-Plastic Threshold Indentation and the Residual Stress in Thin Films

Published online by Cambridge University Press:  15 February 2011

J. E. Houston  and
T. A. Michalske
J. E. Houston
Affiliation:
Sandia National Laboratories Albuquerque, NM 87185-1413
T. A. Michalske
Affiliation:
Sandia National Laboratories Albuquerque, NM 87185-1413
Get access

Abstract

In recent studies, we used the Interfacial Force Microscope in a nanoindenter mode to survey the nanomechanical properties of Au films grown on various substrates. Quantitative tabulations of the indentation modulus and the maximum shear stress at the plastic threshold showed consistent values over individual samples but a wide variation from substrate to substrate. These values were compared with film properties such as the surface roughness, average grain size and interfacial adhesion and no correlation was found. However, in a subsequent analysis of the the results, we found consistencies which support the integrity of the data and point to the fact that the results are sensitive to some property of the various film/substrate combinations. In the present paper, we discuss these consistencies and show recent measurements which strongly suggest that the property that is being probed is the residual stress in the films caused by their interaction with the substrate surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 3
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Joyce, S. A., Thomas, R. C., Houston, J. E., Michalske, T. A. and Crooks, R. M., Phys. Rev. Lett. 68, 2790 (1992).Google Scholar
2. Thomas, R. C.,. Houston, J. E.,. Michalske, T. A. and Crooks, R. M., Science 259, 1883 (1993).Google Scholar
3. Tangyunyong, P., Thomas, R. C., Houston, J. E., Michalske, T. A., Crooks, R. M. and Howard, A. J., Phys. Rev. Lett. 71, 3319 (1993).Google Scholar
4. Tangyunyong, P., Thomas, R. C., Houston, J. E., Michalske, T. A., Crooks, R. M. and Howard, A. J., J. Adhes. Sci. Technol. 8, 897 (1994).Google Scholar
5. Timoshenko, S. P. and Goodier, J. N., Theory of Elasticity, McGraw-Hill, New York (1970), Chapt. 12.Google Scholar
6. See, for example: Hertzberg, R.W., Deformation and Fracture Mechanics of Engineering Materials, John Wiley and Sons, New York 1989, Chap. 2.Google Scholar
7. Pharr, G. M., Tsui, T. Y., Boshakov, A. and Oliver, W. C., Mat. Res. Soc. Proc. 338, 127 (1994).Google Scholar
8. Flexus, Inc., Sunnyvale, CAGoogle Scholar