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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Nanopipes and Inversion Domains in High-Quality GaN Epitaxial Layers

Published online by Cambridge University Press:  10 February 2011

F. A. Ponce ,
W. T. Young ,
D. Cherns ,
J. W. Steeds  and
S. Nakamura
F. A. Ponce
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
W. T. Young
Affiliation:
University of Bristol, H. H. Wills Physics Laboratory, Bristol BS8 1TL, UK
D. Cherns
Affiliation:
University of Bristol, H. H. Wills Physics Laboratory, Bristol BS8 1TL, UK
J. W. Steeds
Affiliation:
University of Bristol, H. H. Wills Physics Laboratory, Bristol BS8 1TL, UK
S. Nakamura
Affiliation:
Nichia Chemical Industries, 491 Oka, Kaminaka, Anan, Tokushima 774, Japan
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Abstract

In this paper we report that, in addition to dislocations, two other types of defects are observed in high quality GaN thin films. These defects have a filamentary nature, are oriented along the <0001> direction. and may not be easily distinguished from the pure dislocations. Using a combination of conventional electron microscopy with convergent beam electron diffraction techniques we show that one of these types of dislocations consist of nanopipes, which are coreless dislocations with Burgers vectors <0001>. The other type of observed defects consist of inversion domains with [0001 ] orientation within the [0001] matrix. The origin of the inversion domains and nanopipes is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 449: Symposium N – III-V Nitrides , 1996 , 405
Copyright
Copyright © Materials Research Society 1997

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References

1. Lester, S.D., Ponce, F.A., Craford, M.G., Steigerwald, D.A., Appl. Phys. Lett. 66, 1249 (1995).CrossRefGoogle Scholar
2. Ponce, F. A., Major, J. S. Jr., Plano, W. E., Welch, D. F., Appl. Phys. Lett., 65, 2303 (1994).CrossRefGoogle Scholar
3. Ponce, F. A., Bour, D. P., Young, W. T., Saunders, M., and Steeds, J. W., Appl. Phys. Lett. 69, 337 (1996).CrossRefGoogle Scholar
4. Ning, X. J., Chien, F. R., Pirouz, P., Yang, J. W., and Khan, M. A., Mater, J.. Res. 11, 580 (1996).Google Scholar
5. Ponce, F. A., Cherns, D., Young, W. T., and Steeds, J. W., Appl. Phys. Lett. 69, 770 (1996).CrossRefGoogle Scholar
6. Nakamura, S., Jpn. J. Appl. Phys. 30, 1620 (1991).CrossRefGoogle Scholar
7. Cherns, D., Young, W. T., Steeds, J. W., Ponce, F. A., and Nakamura, S., J. Crystal Growth (1997), in press.Google Scholar
8. Frank, F. C., Acta Cryst. 4, 497 (1951).CrossRefGoogle Scholar
9. Qian, W., Skowronski, M., Doverspike, K., Rowland, L. B., and Gaskill, D. K., Cryst, J.. Growth 151, 396 (1995).CrossRefGoogle Scholar
10. Qian, W., Rohrer, G. S., Skowronski, M., Doverspike, K., Rowland, L. B., and Gaskill, D. K., Appl. Phys. Lett. 67, 2284 (1995).CrossRefGoogle Scholar
11. Romano, L. T. and Northrup, J. E., MRS Proc. 449, 423 (1996). (These Proceedings).CrossRefGoogle Scholar
12. Chems, D., Young, W. T., Steeds, J. W., Ponce, F. A., and Nakamura, S., (1997), submitted.Google Scholar
13. Northrup, J. E., Neugebauer, J., and Romano, L. T., Phys. Rev. Lett. 77, 103 (1996).CrossRefGoogle Scholar

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