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Microstructures in thin BaTiO3 Films by Hydrothermal Method

Published online by Cambridge University Press:  10 February 2011

T. Hoffmann  and
V. M. Fuenzalida
T. Hoffmann
Affiliation:
Departamento de Fisica, Universidad de Chile, Casilla 487–3, Santiago, Chile
V. M. Fuenzalida
Affiliation:
Departamento de Fisica, Universidad de Chile, Casilla 487–3, Santiago, Chile
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Abstract

Barium titanate microstructures are fabricated on silicon(100)/platinum substrates coated with photoresist and titanium by a combination of hydrothermal and lift-off techniques. The microstructures of 10μm width are well defined. The barium titanate films grow in its cubic phase. Analysis by means of x-ray diffraction and scanning electron microscopy shows that only a part of the titanium layer is affected by the hydrothermal reaction. This limitation may be overcome by application of electrochemistry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 495: Symposium W – Chemical Aspects of Electronic Ceramics Processing , 1997 , 451
Copyright
Copyright © Materials Research Society 1998

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