Skip to main content Accessibility help
×
Home
Hostname: page-component-747cfc64b6-hfbn9 Total loading time: 0.326 Render date: 2021-06-12T12:40:33.245Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": true, "newCiteModal": false, "newCitedByModal": true, "newEcommerce": true }

Microcrystalline Silicon Solar Cells at Higher Deposition Rates by the VHF-GD

Published online by Cambridge University Press:  15 February 2011

P. Torres
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
J. Meier
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
M. Goetz
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
N. Beck
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
U. Kroll
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
H. Keppner
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
A. Shah
Affiliation:
Institut de Microtechnique, Rue A.-L. Breguet 2, CH-2000 Neuchâtel, Switzerland
Get access

Abstract

A 7.7 % single junction cell efficiency for an entirely microcrystalline silicon (μc-SiH) device has recently been reported by our group [1]. This was achieved by applying the purifier technique, a technique which is indeed easier to handle than the earlier used “microdoping” approach. The purpose of the present paper is twofold: First to show in detail the impact on device performance when a gas purifier is used; and second to illustrate that the deposition rate of the active, absorbing i-layer can be increased from the former 1.55 Å/s up to 4.3 Å/s while still maintaining reasonable device performances. In the latter case a first n-i-p solar cell structure on an aluminium sheet could be fabricated with an efficiency of 4.9 %.

Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below.

References

[1]Meier, J., Torres, P., Platz, R., Dubail, S., Kroll, U., Anna Selvan, J.A., Pellaton Vaucher, N., Hof, Ch., Fischer, D., Keppner, H., Shah, A., Ufert, K.-D., Giannoulès, P., and Koehler, J., Mat. Res. Soc. Symposium, San Francisco (1996), to be published.Google Scholar
[2]Wang, C. and Lucovsky, G., Proc. of 21st IEEE Spec. Conf., p. 1614, (1990).Google Scholar
[3]Lucovsky, G., Wang, C., Williams, M.J., Chen, Y.L., and Maher, D.M., Mat. Res. Soc. Symp. Proc. 283, 443 (1993).Google Scholar
[4]Spear, W. E., Willeke, G., and LeComber, P. G., Physica 117B&118B, 908 (1983).Google Scholar
[5]Turner, W. A., Williams, M.J., Chen, Y.L., Maher, D.M., Lucovsky, G., Mat. Res. Soc. Symp. Proc. 283, 567 (1993).Google Scholar
[6]Flückiger, R., Meier, J., Götz, M., and Shah, A., J. Appl. Phys. 77, 712 (1995).Google Scholar
[7]Vepřek, S., Iqbal, Z., Kühne, R. O., Capezzuto, P., Sarott, F.-A., and Gimzewski, J. K., J. Phys. C: Solid State Phys., 16, 6341 (1983).Google Scholar
[8]Mattenberger, F. and Vepřek, S., CHEMTRONICS, 1, 107 (1986).Google Scholar
[9]Konuma, M., Curtins, H., Sarott, F.-A and Vepřek, S., Phil. Mag B, 55 – 3, 377 (1987).Google Scholar
[10]Kroll, U., Meier, J., Keppner, H., Littlewood, S.D., Kelly, I.E., Giannoulès, P., and Shah, A., Mat. Res. Soc. Symp. Proc. 377, 39 (1995).Google Scholar
[11]Kroll, U., Meier, J., Keppner, H., Shah, A., Littlewood, S.D., Kelly, I.E., and Giannoulès, P., J. Vac. Sci. Technol. A 13, 2724 (1995).Google Scholar
[12]Torres, P., Meier, J., Flückiger, R., Kroll, U., Anna Selvan, J. A., Keppner, H., Shah, A., Littlewood, S. D., Kelly, I. E, and Giannoulès, P., Appl. Phys. Lett. 69, 1373 (1996).Google Scholar
[13]Green, M.A., High Efiiciency Silicon Solar Cells, Trans Tech Publications, ISBN 0–87849–537–1, 126 (Aedermannsdorf, 1987).Google Scholar
[14]Prasad, K., Ph. D. thesis, Institute of Microtechnology, University of Neuchâtel (1991).Google Scholar
[15]Flückiger, R., Ph. D. thesis, Institute of Microtechnology, University of Neuchâtel, ISBN 3–89191–965–4 (1995).Google Scholar
[16]Anna Selvan, J.A., Keppner, H., and Shah, A., Mat. Res. Soc. Symp., San Francisco (1996), to be published.Google Scholar
[17]Goetz, M., Torres, P., Pernet, P., Meier, , Fischer, D., Keppner, H., and Shah, A., this conference.Google Scholar
[18]Meier, J., Dubail, S., Flückiger, R., Fischer, D., Keppner, H., and Shah, A., Proc. y24th IEEE, 409 (1994).Google Scholar
[19]Green, M. A., Keevers, M. J., Progress in Photovoltaics: Research and Applications 3, 189 (1995).Google Scholar
[20]Beck, N., Torres, P., Fric, J., Remeš, Z., Poruba, A., Stuchlíkovč, Ha, Fejfar, A., Wyrsch, N., Vaněček, M., Kočka, J., Shah, A., this conference.Google Scholar
[21]Beck, N., Meier, J., Fric, J., Remeš, Z., Poruba, A., Flückiger, R., Pohl, J., Shah, A. and Vaněček, M., J. Non-Cryst. Solids 198 – 200, 903 (1996).Google Scholar
[22]Keppner, H., Kroll, U., Torres, P., Meier, J., Platz, R., Fischer, D., Beck, N., Dubail, S., Anna Selvan, J.A., Pellaton Vaucher, N., Goerlitzer, M., Ziegler, Y., Tscharner, R., Hof, Ch., Goetz, M., Pernet, P., Wyrsch, N., Vuille, J., Cuperus, J., Shah, A., Pohl, J., and Bucher, E., this conference.Google Scholar
[23]Goetz, M., Keppner, H., Pernet, P., Hotz, W., and Shah, A., Mat. Res. Soc. San Francisco (1996), to be published.Google Scholar

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Microcrystalline Silicon Solar Cells at Higher Deposition Rates by the VHF-GD
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Microcrystalline Silicon Solar Cells at Higher Deposition Rates by the VHF-GD
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Microcrystalline Silicon Solar Cells at Higher Deposition Rates by the VHF-GD
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *