Published online by Cambridge University Press: 10 February 2011
Results from initial efforts to develop a quantitative understanding of the material microstructure – elastic properties relationship for electroplated LIGA nickel will be presented. Microsample tensile testing and microstructural characterization results including grain size and grain orientation measurements obtained using orientation imaging microscopy (OIM) are discussed. The use of these data in the development of a finite element modeling approach to represent the mechanical response of “meso-scale” LIGA nickel MEMS material will be highlighted.
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