Skip to main content Accessibility help
×
Home

Materials Compatibility Between Si/Sio2 Substrates and Batio3 Thin Films

Published online by Cambridge University Press:  15 February 2011

J. V. Caballero
Affiliation:
Universidad de Chile, FCFM, Casilla 487-3, Santiago, Chile, vfuenzal@tamarugo.cec.cl
V. M. Fuenzalida
Affiliation:
Universidad de Chile, FCFM, Casilla 487-3, Santiago, Chile, vfuenzal@tamarugo.cec.cl
R. Ávila
Affiliation:
Comisión Chilena de Energía Nuclear, Casilla 188-D, Santiago, Chile.
I. Eisele
Affiliation:
Universität der Bundeswehr, W.Heisenberg Weg 39, D85577 Neubiberg, Germany
Corresponding
E-mail address:
Get access

Abstract

BaTiO3 thin films, 50–60 nm in thickness, were evaporated in Ultra High Vacuum as well as under 1 mPa O2 pressure onto Si/SiO2 (30 nm) wafers. The substrate temperature during the evaporations was approximately 70 °C. The films were flash annealed in oxygen at 500 °C. The interfacial reactions were studied by XPS and AES Ar ion assisted depth profiling, and by RBS. Interdiffusion took place even at 70 °C. The XPS/AES depth profiles suggested strong interdiffusion, with Ba being the dominant moving species. The SiO2/BaTiO3 interface smears out with significant Ba concentrations up to half of the SiO2 thickness. Ti diffusion is remarkably lower. Barium is detected up to the SiO2/Si interface.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below.

References

[1] Jia, Q. X., Chiang, L. H. and Anderson, W. A., Thin Solid Films, 12, 264 (1995).CrossRefGoogle Scholar
[2] , I. H2. Proceeding of the IEEE, 59, 1440 (1971).CrossRefGoogle Scholar
[3] Jia, Q. X., Shi, Z. Q, Anderson, W. A, Thin SolidFilms V209(1992)230239 CrossRefGoogle Scholar
[4] Chiou, B-S. and Lin, M-C., Thin Solid Films 248, 247 (1994).CrossRefGoogle Scholar
[5] Jia, Q. X., Shi, Z. Q., Ti, J. and Anderson, W. A., J. Electr. Mater. 23, 53, 1994 CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 4 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 21st January 2021. This data will be updated every 24 hours.

Hostname: page-component-76cb886bbf-tvlwp Total loading time: 0.232 Render date: 2021-01-21T11:13:29.102Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Materials Compatibility Between Si/Sio2 Substrates and Batio3 Thin Films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Materials Compatibility Between Si/Sio2 Substrates and Batio3 Thin Films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Materials Compatibility Between Si/Sio2 Substrates and Batio3 Thin Films
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *