Published online by Cambridge University Press: 22 August 2011
Electrode thin films made of LiCoO2, Li-Mn-O and SnO2 were synthesized by rf magnetron sputtering on silicon and stainless steel substrates. In order to increase the active surface direct laser structuring methods using ns- and ps-laser sources were applied. A laser system operating at a wavelength of 248 nm with a pulse length of 4-6 ns and repetition rates up to 500 Hz enabled the formation of high aspect ratio micro- and sub-micron structures with feature sizes down to less than 400 nm. Subsequent to the laser structuring process, laser annealing of LiCoO2 and Li-Mn-O was performed in order to achieve an appropriate crystalline phase which shows improved electrochemical cycling performance. Laser annealing was applied via a high power diode laser system operating at a wavelength of 940 nm. In case of LiCoO2 the high temperature phase was obtained through laser-annealing while for Li-Mn-O the spinel phase was formed. For both LiCoO2 and Li-Mn-O thin films appropriate annealing parameters were temperatures of up to 680 °C and an annealing time of 100 s.
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