Skip to main content Accessibility help

We use cookies to distinguish you from other users and to provide you with a better experience on our websites. Close this message to accept cookies or find out how to manage your cookie settings.

Close cookie message
×
Home
  • Home
Hostname: page-component-559fc8cf4f-s5ss2 Total loading time: 0.248 Render date: 2021-02-26T23:04:33.633Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }
EnglishFrançais
MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

Article contents

Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.

Published online by Cambridge University Press:  21 February 2011

F. Demichelis ,
C.F. Pirri ,
E. Tresso ,
G. DellaMea ,
A. Quaranta ,
V. Rigato ,
M. Ferraris  and
P. Rava
F. Demichelis
Affiliation:
Dipartimento di Fisica ed Unita' INFM Politecnico di Torino (Italy)
C.F. Pirri
Affiliation:
Dipartimento di Fisica ed Unita' INFM Politecnico di Torino (Italy)
E. Tresso
Affiliation:
Dipartimento di Fisica ed Unita' INFM Politecnico di Torino (Italy)
G. DellaMea
Affiliation:
Dipartimento di Fisica ed Unita' INFM Politecnico di Torino (Italy) Laboratori INFN di Legnaro PD (Italy) Dip. Ing. Materiali Univ. di Trento (Italy)
A. Quaranta
Affiliation:
Unita' INFM Universita' di Padova (Italy)
V. Rigato
Affiliation:
Laboratori INFN di Legnaro PD (Italy) Dip. Ing. Materiali Univ. di Trento (Italy)
M. Ferraris
Affiliation:
Centro Ricerche FIAT (Orbassano TO, Italy)
P. Rava
Affiliation:
Elettrorava S.p.A (Savonera To, Italy)
Get access

Abstract

Microcrystalline films of SiC.H have been deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) of SiH4+CH4+H2 mixtures with high power density and high H2 dilution, at variable CH4/SiH4 ratios. Their elemental composition, structural, optical and electrical properties have been investigated in order to evidence the influence of hydrogen and carbon on microcrystallinity.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 258: Symposium A – Amorphous Silicon Technology – 1992 , 1992 , 607
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below.
If you should have access and can't see this content please contact technical support.

References

[1] Hamakawa, Y. and Okamoto, H. -“Wide band-gap semiconductors”- MRS Proceedings (1991) (in press)Google Scholar
[2] Goldstein, B., Dickson, C.R., Campbell, I.H. and Fanchet, P.M. - Proc. 8th E.C. Photovoltaic Solar Energies Conf. - Kluwer Ptc. Pubbl. 969, (1988)Google Scholar
[3] Demichelis, F., Pirri, C.F. and Tresso, E. - Phil. Mag. B, 1992 (in press)Google Scholar
[4] Demichelis, F., Pirri, C.F. and Tresso, E. - Journ. of Appl. Phys., 1992 (in press)Google Scholar
[5] Willeke, G. and Martins, R. - Phyl. Mag. B, 65, 79 (1991)CrossRefGoogle Scholar
[6] Wang, H. and Zhou, G.Q. - Nucl. Instr. and Meth. B 34, 145 (1988)CrossRefGoogle Scholar
[7] Chu, W.X., Mayer, J.W. and Nicolet, M.A. - “Backscattering Spectrometry” - Academic Press, New York (1978)CrossRefGoogle Scholar
[8] Berti, M. and Drigo, A.V. - Nucl. Instr. and Meth. 201, 473 (1982)CrossRefGoogle Scholar
[9] Demichelis, F., Pirri, C.F., Tresso, E. and Stapinski, T. - Journ. Appl. Phys. 71 (1992) (in press)Google Scholar
[10] Lucovsky, G. and Wang, C. - MRS Soc. Symp. Proc. 219, 377 (1991)CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 5 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 26th February 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.
Available formats
×
×

Reply to: Submit a response

Your details

Conflicting interests

Do you have any conflicting interests? *