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Hydrogen Passivation and Reactivation of Bistable Thermal Donors in Silicon
Published online by Cambridge University Press: 03 September 2012
Abstract
The dissociation of Thermal Donor-hydrogen complexes is studied by infra-red absorption, CV and DLTS profiling. Silicon samples are prepared to contain only TD1 and TD2 and in particular only TD1 is exhibiting bistable properties. After hydrogen passivation, annealing in the dark under reverse bias leads to a first order reactivation of TD1 and TD2. A marked difference in the dissociation energies is found (ED(TD1 - H) = 1.67eV, ED (TD2 - H)≈ 1.9eV). Our results suggest that TD1 and TD2 have a different microscopic structure.
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- Copyright © Materials Research Society 1992
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