Skip to main content Accessibility help
×
Home
Hostname: page-component-59b7f5684b-ns2hh Total loading time: 0.269 Render date: 2022-09-26T03:35:26.536Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "useRatesEcommerce": false, "displayNetworkTab": true, "displayNetworkMapGraph": false, "useSa": true } hasContentIssue true

High-density Co/Al2O3 core-shell nanocrystal memory

Published online by Cambridge University Press:  25 May 2012

Huimei Zhou
Affiliation:
Department of Electrical Engineering, University of California, Riverside, California 92521
Zonglin Li
Affiliation:
Department of Electrical Engineering, University of California, Riverside, California 92521
Jian Huang
Affiliation:
Department of Electrical Engineering, University of California, Riverside, California 92521
Jianlin Liu
Affiliation:
Department of Electrical Engineering, University of California, Riverside, California 92521
Get access

Abstract

Metal/high-k dielectric core-shell nanocrystal (NC) memory capacitors were demonstrated by e-beam evaporation process. This kind of metal oxide semiconductor (MOS) memory shows good performance in charge storage, programming and erasing speeds. Compared to Co NC memory, Co/Al2O3 core-shell NC memory shows improved retention performance since the additional Al2O3 shell layer acts as a barrier, which prevent the leakage.

Type
Articles
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Oh Chang, W., Sung, H. K., Na, Y. K., Yong, L. C., Yong, S. L., Won, J. J., Hyo, S. L., Heung, S. P., Kim, D. W., Park, D., Ryu, B., VLSI Symp. Tech. Dig., 58 (2006)Google Scholar
2. Chang, Ting-Chang, Jiana, Fu-Yen, Chen, Shih-Cheng, and Tsai, Yu-Ting, Materialstoday 8 808 (2011)Google Scholar
3. Dimitrakis, P, Kapetanakis, E, Tsoukalas, D, Skarlatos, D, Bonafos, C, Ben Asssayag, G, Claverie, A, Perego, M, Fanciulli, M, Soncini, V, Sotgiu, R, Agarwal, A, Ameen, M, Sohl, C, Normand, P, Solid-State Electronics 48 1511(2004)CrossRefGoogle Scholar
4. Lee, P F, Lu, X B, Dai, J Y, Chan, H L W, Jelenkovic, Emil and Tong, K Y, Nanotechnology 17 1202 (2006)CrossRefGoogle Scholar
5. Ma, X. Wan, C., Appl. Phys. B: Lasers and Optics 92 589 (2008)CrossRefGoogle Scholar
6. Leu, Ching-Chich, Chen, Shih-Tang, Liu, Fu-Ken, Thin Solid Films 519 5629 (2011)CrossRefGoogle Scholar
7. Liu, Zengtao, Lee, Chungho, Narayanan, Venkat, Pei, Gen, Student Member and Kan, Edwin C., IEEE Electron Device Letters 24 345 (2003)Google Scholar
8. Liu, Zengtao, Lee, Chungho, Narayanan, Venkat, Pei, Gen, and Chihchuan Kan, Edwin, IEEE Trans. Electron Devices 49 1614 (2002)CrossRefGoogle Scholar
9. Chen, Wei-Ren, Chang, Ting-Chang, Tsun Liu, Po, Sun Lin, Po, Tu, Chun-Hao, and Chang, Chun Yen, Appl. Phys. Lett. 90 112108 (2007)CrossRefGoogle Scholar
10. Lee, Dong Uk, Kim, Seon Pil, Han, Dong Seok, Lee, Hyo Jun, Kim, Eun Kyu, You, Hee Wook, Cho, Won Ju, Journal of Nanoscience and Nanotechnology 11, 9181 (2011)CrossRefGoogle Scholar
11. Zhu, Y., and Liu, J. L., IEEE Transactions on Nanotechnology 7 305 (2008)Google Scholar
12. Maikap, S., Tzeng, P.J., Lin, C.H., Wang, T. Y., Lee, H.Y., Tzeng, S. S., Wang, C.C., Tien, T.C., Lee, L. S., Li, P. W., Yang, J. R., Tsai, M. J., International Journal of Nanomanufacturing 2 407 (2008)CrossRefGoogle Scholar
13. Hou, T. H., Lee, C., Narayanan, V., Ganguly, U., and Kan, E. C., IEEE Trans. Electron Devices 53 12 (2006)Google Scholar
14. Zhou, Huimei, Gann, Reuben, Li, Bei, Liu, Jianlin and Yarmoff, J. A., Mater. Res. Soc. Symp. Proc. 1160 1160–H01–05 (2009)CrossRefGoogle Scholar
15. Zhou, Huimei, Li, Bei, Yang, Zheng, Zhan, Ning, Yan, Dong, Lake, Roger K., and Liu, Jianlin, IEEE Trans. Nanotechnol. 10 499 (2011)CrossRefGoogle Scholar
16. Lee, J. J., Harada, Y., Pyun, J. W., and Kwong, D. L., Appl. Phys. Lett. 86 103505 (2005)CrossRefGoogle Scholar
17. Zhou, Huimei, Dorman, James A., Perng, Ya-Chuan, Gachot, Stephanie, Zheng, Jian-Guo, Chang, Jane P. and Liu, Jianlin, Appl. Phys. Lett. 98 192107 (2011)CrossRefGoogle Scholar
18. Zhou, Huimei, Dorman, James A., Perng, Ya-Chuan, Gachot, Stephanie, Huang, Jian, Mao, Yuanbing, Chang, Jane P. and Liu, Jianlin, Mater. Res. Soc. Symp. Proc. 1250 1250–G01-09 (2010)CrossRefGoogle Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

High-density Co/Al2O3 core-shell nanocrystal memory
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

High-density Co/Al2O3 core-shell nanocrystal memory
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

High-density Co/Al2O3 core-shell nanocrystal memory
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *