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High-density Co/Al2O3 core-shell nanocrystal memory
Published online by Cambridge University Press: 25 May 2012
Abstract
Metal/high-k dielectric core-shell nanocrystal (NC) memory capacitors were demonstrated by e-beam evaporation process. This kind of metal oxide semiconductor (MOS) memory shows good performance in charge storage, programming and erasing speeds. Compared to Co NC memory, Co/Al2O3 core-shell NC memory shows improved retention performance since the additional Al2O3 shell layer acts as a barrier, which prevent the leakage.
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- Information
- MRS Online Proceedings Library (OPL) , Volume 1430: Symposium E – Materials and Physics of Emerging Nonvolatile Memories , 2012 , mrss12-1430-e03-02
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- Copyright © Materials Research Society 2012