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Hard Amorphous Carbon Films Deposited by ArF Pulse Laser Ablation of Graphite at Room Temperature

Published online by Cambridge University Press:  25 February 2011

Fulin Xiong  and
R. P. H. Chang
Fulin Xiong
Affiliation:
Department of Materials Science and Engineering, and Materials Research Center Northwestern University, 2145 Sheridan Road, Evanston, IL 60208
R. P. H. Chang
Affiliation:
Department of Materials Science and Engineering, and Materials Research Center Northwestern University, 2145 Sheridan Road, Evanston, IL 60208
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Abstract

Hard amorphous carbon films have been deposited by ArF pulsed laser ablation of graphite at room temperature, with the laser power density of 5x108 W/cm2. The films prepared in the high vacuum environment possess remarkable diamond-like properties with a hardness up to 38 GPa and an optical energy band gap of 2.4 eV. The properties of the films doped with nitrogen vary with the nitrogen content, but improve interface adhesion, resulting in the extension of the film thickness limit to a greater range. The results suggest that the properties of the laser ablation deposited diamond-like carbon films depend not only on the laser power density, but also strongly on the laser wavelength or photon energy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 451
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. Angus, J. C. and Hayman, C. C., Science 241, 913 (1988).CrossRefGoogle Scholar
2. Tsai, H. C. and Bogy, D. B., J. Vac. Sci. Technol. A 5, 3287 (1987).Google Scholar
3. Demers, R. T. and Harris, D. G., SPIE Vol. 1 68 (1989).Google Scholar
4. Sato, T., Furuno, S., Iguchi, S., and Hanabusa, M., Appl. Phys. A 45, 355 (1988).Google Scholar
5. Krishnaswamy, J., Rengan, A., Narayan, J., Vedam, K., and Mchargue, C. J., Appl. Phys. Lett. 54, 2455 (1989).Google Scholar
6. Krishnaswamy, J., Rengan, A., Sirvatsa, A. R., Matera, G., and Narayan, J., SPIE Vol. 1190 109 (1989).Google Scholar
7. Marquardt, C. L., Williams, R. T., and Nagel, D. J., Mat. Res. Soc. Symp. Proc. Vol. 3A 325 (1985).Google Scholar
8. Davanloo, F., Juengerman, E. M., Jander, D. R., Lee, T. J., and Collins, C. B., J. Appl. Phys. 67, 2081 (1990).CrossRefGoogle Scholar
9. Collins, C. B., Davanloo, F., Jander, D. R., Lee, T. J., Park, H., and You, J. H., J. Appl. Phys. 69, 7862 (1991).CrossRefGoogle Scholar
10. Fujimori, S., Kasai, T., and Inamura, T., Thin Solid Film 92, 71 (1982).CrossRefGoogle Scholar
11. Malshe, A. P., Chaudhari, S. M., Kanetkar, S. M., Ogale, S. B., Rajarshi, S. V., and Kshirsagar, S. T., J. Mat. Res. 4, 1238 (1986).Google Scholar
12. Liu, A. Y. and Cohen, M. L., Science 245, 841 (1989).Google Scholar
13. Savvides, N., J. Appl. Phys. 59, 4133 (1986).CrossRefGoogle Scholar
14. Tauc, J., Grigorovici, R., and Vancu, A., Phys. Status Solidi 15, 627 (1966).Google Scholar
15. Silverstain, R. M., Bassler, G. C., and Morrill, T. C., “Spectrometric Identification of Organic Compounds”, 5th ed. (John Wiley and Sons, New York, 1991) p.91.Google Scholar
16. Lin-Vien, D., Colthup, N. B., Fateley, W. G., and Grasselli, J. G., “The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules” (Academic Press, New York, 1991).Google Scholar
17. Grill, A. and Patel, V., Appl. Phys. Lett. 60, 2089 (1992).Google Scholar
18. Kaufman, J. H., Metin, S., and Saperstain, D. D., Phys. Rev. B 39, 13053 (1989).Google Scholar
19. Knight, D. S. and White, W. B., J. Mat. Res. 4, 385 (1989).Google Scholar
20. Tuinstra, F. and Kocning, J. L., J. Chem. Phys. 53, 1126 (1970).Google Scholar
21. Hark, S. K., Machonkin, M. A., Lansen, F., Slade, M. L., and Weinstein, B. A., AIP conf. Proc. 1 465 (1984).CrossRefGoogle Scholar
22. Hubler, G. K., MRS Bulletin 17(2), 26 (1992).Google Scholar
23. Murray, P. T., and Dempsey, D. V., Mat. Res. Soc. 1991 Fall Meeting presentation B9.3/A16.3 (to be published).Google Scholar
24. Thebert-Peeler, D., Murray, P. T., Petry, L., and Haas, T. W., Mat. Res. Soc. Symp. Proc. (Fall 1991) (to be published).Google Scholar