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Gas Phase and Gas Surface Kinetics of Transient Silicoin Hydride Species
Published online by Cambridge University Press: 22 February 2011
Abstract
This paper presents a summary of the current state of our understanding of the absolute reactivity of transient silicon hydride species, such as SiH, SiH2 and SiH3 in the gas phase and at the surface of thin films.
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- Copyright © Materials Research Society 1994
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