Skip to main content Accessibility help
×
Home
Hostname: page-component-78dcdb465f-fqvcn Total loading time: 0.242 Render date: 2021-04-16T04:08:45.387Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Formation and Cathodoluminescence of Silicon Nanoclusters in Silica

Published online by Cambridge University Press:  11 February 2011

Maria V. Zamoryanskaya
Affiliation:
Ioffe Physico-Technical Institute, 26, Polytecknycheskaya st, St. Petersburg, Russia 194021, email: zam@pop.ioffe.rssi.ru, fax.7–812–2471017.
Vladimir I. Sokolov
Affiliation:
Ioffe Physico-Technical Institute, 26, Polytecknycheskaya st, St. Petersburg, Russia 194021, email: zam@pop.ioffe.rssi.ru, fax.7–812–2471017.
Corresponding
E-mail address:
Get access

Abstract

The process of formation of silicon nanoclusters in a silicate matrix by the focused electron beam of high power and their cathodoluminescent properties were studied in this paper. The size of the silicon clusters and their concentration depend on the electron beam power and on the properties of the silicate matrix (density, porosity, composition). In this paper we studied the evolution of cathodoluminescent properties in bulk silicon oxide, porous silicon oxide glass, silicagel (n·SiO2·m·H2O) and opal. The result of the modification of silica is the appearance of the CL bands at 2.3eV in green region, and the bands at 1.4 and 1.1eV. The CL intensity of these bands increases during the interaction with electron beam. The volt-ampere characteristics of the modified areas of the silica are non-linear and depend on the time of the interaction and the power of the electron beam. We relate the appearance of these new CL bands with formation of oxygen-deficit defects and silicon clusters.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below.

References

Kolobov, N.A., Samochvalov, M.M.: Diffusion and Oxidation in Semiconductors. (Metallurgy, Moscow 1975)Google Scholar
[2] Zamoryanskaya, M.V., Sokolov, V.I.. Physic of Solid State, Vol, 42 (2001) p.Google Scholar
[3] Zamoryanskaya, M.V., Vainshenker, I.A., Zamoryanskyi, A.N., Equipment and Technique of Experiment, (1987), N.4, p.161.Google Scholar
[4] Zamoryanskaya, M.V., Sokolov, V.I., Sitnikova, A.A., Konnikov, C.G., Silid State Phenomena, Vol. 63–64 (1998), p.237.CrossRefGoogle Scholar
[5] Skuja, L.N., Silin, A.R., Phys. Stat. Solid. A, Vol. 70, (1982), p.43.CrossRefGoogle Scholar
[6] Goldberdge, M., Fittihg, H.-J., Trukhin, A., J. Non-Cryst. Solids Vol. 220 (1997), p.69 CrossRefGoogle Scholar
[7] Skuja, L.N., Streletsky, A.N., Pakovich, A.B., Solid State Com. Vol. 50, (1984), p.1069 CrossRefGoogle Scholar
[7] Nishikawa, H., Watanabe, E., Ito, D., Sakurai, Y., Nagasawa, K., Ohki, Y., J. Appl. Phys, Vol. 80, (1996), p.3513.CrossRefGoogle Scholar
[8] Bary, V.G., Elinson, M.I., Gitov, V.A., Zaharov, L. Yu., Luzanov, V.A., Melnik, N.N., Steponav, G.V., Chernuchin, A.P., Microelectronic Vol.27 (1998), p.45.Google Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 8 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 16th April 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Formation and Cathodoluminescence of Silicon Nanoclusters in Silica
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Formation and Cathodoluminescence of Silicon Nanoclusters in Silica
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Formation and Cathodoluminescence of Silicon Nanoclusters in Silica
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *