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Ferroelectricity of Lead-Zirconate-Titanate Thin Films Prepared by Laser Ablation

Published online by Cambridge University Press:  25 February 2011

Toshio Ogawa
Affiliation:
Murata Manufacturing Co, Ltd., Nagaokakyo, Kyoto 617, Japan
Hideo Kidoh
Affiliation:
Murata Manufacturing Co, Ltd., Nagaokakyo, Kyoto 617, Japan
Hideyuki Yashima
Affiliation:
Department of Electronics, Faculty of Technology, Kanazawa University, Kanazawa 920, Japan
Akiharu Morimoto
Affiliation:
Department of Electronics, Faculty of Technology, Kanazawa University, Kanazawa 920, Japan
Tatsuo Shimizu
Affiliation:
Department of Electronics, Faculty of Technology, Kanazawa University, Kanazawa 920, Japan
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Abstract

Lead-zirconate-titanate films were prepared by excimer laser ablation. The coercive field of films deposited on MgO substrates with an electrode was lower than that of films deposited on sapphire substrates. Laser fluence influenced the grain and crystalline size, resulting in a change in the Ec. Film thicknesses were varied over a range from 0.3 to 2.41μm, with the thinnest film showing a large remanent polarization even at an applied effective voltage of 5V.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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References

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