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Fabrication of Ordered Metallic Nanocluster Arrays Using a Focused Ion Beam

Published online by Cambridge University Press:  11 February 2011

Matthew D. McMahon
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Anthony B. Hmelo
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Rene Lopez
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Wesley T. Ryle
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Allen T. Newton
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Richard F. Haglund Jr
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Leonard C. Feldman
Affiliation:
Dept of Physics and Astronomy, Vanderbilt University, Nashville, TN 37235, U.S.A.
Robert A. Weller
Affiliation:
Dept of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN 37235, U.S.A.
Robert H. Magruder III
Affiliation:
Dept of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN 37235, U.S.A. Dept of Chemistry and Physics, Belmont University, Nashville, TN 37212–3757, U.S.A.
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Abstract

We have fabricated ordered arrays of gold nanocrystals on FIB-processed silicon substrates using electroless deposition. We have also fabricated ordered arrays of silver nanocrystals on silicon with diameters 40–60 nm separated by 180 nm center-to-center, using pulsed-laser deposition (PLD) to deposit silver on the substrate. The metal nanocrystal arrays are characterized using SEM as well as AFM and energy dispersive x-ray (EDX) analysis. AFM confirms particle sizes measured in SEM, and EDX analysis demonstrates that Ag preferentially clusters at sites that have been damaged by the ion beam. These results suggest that the FIB-PLD combination can be used to create ordered arrays of Ag nanocrystals with diameters of 10 nm or less.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

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References

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