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Engineering of Porosity in Amorphous Materials. Plasma Oxidation of Hydrocarbon Templates in Polysilsesquioxanes*

Published online by Cambridge University Press:  21 February 2011

Douglas A. Loy ,
Richard J. Buss ,
Roger A. Assink ,
Kenneth J. Shea  and
Henry Oviatt
Douglas A. Loy
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Richard J. Buss
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Roger A. Assink
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
Kenneth J. Shea
Affiliation:
Department of Chemistry, University of California, Irvine, CA 92717.
Henry Oviatt
Affiliation:
Department of Chemistry, University of California, Irvine, CA 92717.
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Abstract

Arylene- and alkylene-bridged polysilsesquioxanes were prepared by sol-gel processing of bis(triethoxysilyl)-arylene monomers 1-4, and alkylene monomers 5-9. The arylene polysilsesquioxanes were porous materials with surface areas as high as 830 m2/g (BET). Treatment with an inductively coupled oxygen plasma resulted in the near quantitative removal of the arylene bridging groups and a coarsening of the pore structure. Solid state 29Si NMR was used to confirm the conversion of the sesquioxane silicons (T) to silica (Q). The alkylene-bridged polysilsesquioxanes were non-porous. Oxygen plasma treatment afforded silica gels with mesoporosity. The porosity in the silica gels appears to arise entirely from the oxidation of the alkylene spacers.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 346: Symposium N – Better Ceramics Through Chemistry VI , 1994 , 825
Copyright
Copyright © Materials Research Society 1998

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References

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