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Effects of O2 Gas Addition on Diamond-Like Carbon Film Deposition

Published online by Cambridge University Press:  10 February 2011

N. Nakamura
Affiliation:
Inorganic Materials & Polymers Laboratory, Fujitsu Laboratories LTD. 10-1, Morinosato-Wakamiya, Atsugi 243-0197, JAPAN E-mail: nnakamu@flab.fuj itsu.co.jp
T. Itani
Affiliation:
Inorganic Materials & Polymers Laboratory, Fujitsu Laboratories LTD. 10-1, Morinosato-Wakamiya, Atsugi 243-0197, JAPAN E-mail: nnakamu@flab.fuj itsu.co.jp
H. Chiba
Affiliation:
Inorganic Materials & Polymers Laboratory, Fujitsu Laboratories LTD. 10-1, Morinosato-Wakamiya, Atsugi 243-0197, JAPAN E-mail: nnakamu@flab.fuj itsu.co.jp
K. Watanabe
Affiliation:
Inorganic Materials & Polymers Laboratory, Fujitsu Laboratories LTD. 10-1, Morinosato-Wakamiya, Atsugi 243-0197, JAPAN E-mail: nnakamu@flab.fuj itsu.co.jp
K. Kurihara
Affiliation:
Inorganic Materials & Polymers Laboratory, Fujitsu Laboratories LTD. 10-1, Morinosato-Wakamiya, Atsugi 243-0197, JAPAN E-mail: nnakamu@flab.fuj itsu.co.jp
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Abstract

The role of 02 gas addition on the deposition of Diamond-like Carbon (DLC) film was studied for hard disk drive (HDD) media application. The influence of 02 gas mixing ratio on DLC film quality was investigated using the dc magnetron sputtering method with a solid graphite target and Ar, CH4 and 02 mixing gases. The 02 mixing ratio was varied between 0% and 50%. Film quality was evaluated using Raman spectroscopy and XPS. When 02 gas mixing ratio increased the peak in Raman spectra shifted gradually to higher wavenumbers and its bandwidth became narrower. This indicates graphite component increased in the DLC film. In addition, the lubricant coverage on oxygen-containing DLC was improved. Because adding oxygen increases the terminations of carbonyl group on DLC surface, this result suggests that the polar surface causes higher affinity for the lubricant

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

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