Published online by Cambridge University Press: 25 February 2011
Amorphous and microcrystalline silicon carbide, undoped and doped, are promising materials as wide band gap semiconductors (Eg > 2 eV). In the present work results on nydrogenated and fluorinated a-SiC and uc-SiC films intrinsic, B or P doped are reported. Energy gap higher than 2 eV are obtained together with electrical dark conductivities in the range 10-12 -10-2 Ω-1cm-1
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