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Development of a Micromirror Using Piezoelectric Excited and Actuated Structures
Published online by Cambridge University Press: 15 February 2011
Abstract
The design and fabrication process of a micro-mirror device is presented. The device is driven by sol-gel deposited PZT-layer actuators. The mirror is designed to be able to carry out scanning in two lateral directions, and additionally movement in vertical direction using a FEMsimulation tool. The established fabrication process is described.
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- Research Article
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- Copyright © Materials Research Society 1997
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