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Determination of Composition and Linear Lattice Expansion Coefficient in Si1−x Gex/Si Thin Films by Simulation of X-Ray Rocking Curves

Published online by Cambridge University Press:  22 February 2011

F. Cembali
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
R. Fabbri
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
M. Servidori
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
A. Zani
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
S. Iyer
Affiliation:
IBM T.J. Watson Res. Center, Yorktown Heights, NY 10598(USA)
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Abstract

By simulation of X-ray rocking curves of Si-Ge alloys grown on Si by molecular beam epitaxy and of Ge implanted samples, the Ge composition, the linear lattice expansion coefficient, the strain depth-distribution and the static Debye-Waller factor in the MBE alloys have been determined.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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References

1 Zaumseil, P., Winter, U., Cembali, F., Servidori, M. and Sourek, Z., Phys. Stat. Sol.(a) 100, 95 (1987).CrossRefGoogle Scholar
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3 Wie, C.R., Tombrello, T.A. and Vreeland, T. Jr., J.Appl.Phys. 59, 3743 (1986).CrossRefGoogle Scholar
4 Servidori, M. and Cembali, F., J.Appl.Cryst. 21, 176 (1988).CrossRefGoogle Scholar
5 Krivoglaz, M.A., Fiz.Metal.Metalloved 10, 169 (1960).Google Scholar
6 Dismukes, J.P., Ekstrom, L. and Paff, R.J., J.Phys.Chem. 68, 3021 (1964).CrossRefGoogle Scholar
7 Servidori, M., Sourek, S. and Solmi, S., J.Appl.Phys. 62, 1723 (1987).CrossRefGoogle Scholar
8 Krivoglaz, M.A., Theory of X-Ray and Thermal-Neutron Scattering by Real Crystals (Plenum Press, New York, 1969).Google Scholar

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Determination of Composition and Linear Lattice Expansion Coefficient in Si1−x Gex/Si Thin Films by Simulation of X-Ray Rocking Curves
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Determination of Composition and Linear Lattice Expansion Coefficient in Si1−x Gex/Si Thin Films by Simulation of X-Ray Rocking Curves
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