Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-24T05:59:41.915Z Has data issue: false hasContentIssue false
  • English
  • Français

Determination of Composition and Linear Lattice Expansion Coefficient in Si1−x Gex/Si Thin Films by Simulation of X-Ray Rocking Curves

Published online by Cambridge University Press:  22 February 2011

F. Cembali ,
R. Fabbri ,
M. Servidori ,
A. Zani  and
S. Iyer
F. Cembali
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
R. Fabbri
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
M. Servidori
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
A. Zani
Affiliation:
CNR-Istituto LAMEL, via Castagnoli 1, Bologna 40126(Italy)
S. Iyer
Affiliation:
IBM T.J. Watson Res. Center, Yorktown Heights, NY 10598(USA)
Get access

Abstract

By simulation of X-ray rocking curves of Si-Ge alloys grown on Si by molecular beam epitaxy and of Ge implanted samples, the Ge composition, the linear lattice expansion coefficient, the strain depth-distribution and the static Debye-Waller factor in the MBE alloys have been determined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 208: Symposium J – Advances in Surface and Thin Film Diffraction , 1990 , 225
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Zaumseil, P., Winter, U., Cembali, F., Servidori, M. and Sourek, Z., Phys. Stat. Sol.(a) 100, 95 (1987).CrossRefGoogle Scholar
2 Servidori, M., Zani, A. and Garulli, A., Phys.Stat.Sol.(a) 70, 691 (1982).Google Scholar
3 Wie, C.R., Tombrello, T.A. and Vreeland, T. Jr., J.Appl.Phys. 59, 3743 (1986).Google Scholar
4 Servidori, M. and Cembali, F., J.Appl.Cryst. 21, 176 (1988).Google Scholar
5 Krivoglaz, M.A., Fiz.Metal.Metalloved 10, 169 (1960).Google Scholar
6 Dismukes, J.P., Ekstrom, L. and Paff, R.J., J.Phys.Chem. 68, 3021 (1964).Google Scholar
7 Servidori, M., Sourek, S. and Solmi, S., J.Appl.Phys. 62, 1723 (1987).Google Scholar
8 Krivoglaz, M.A., Theory of X-Ray and Thermal-Neutron Scattering by Real Crystals (Plenum Press, New York, 1969).Google Scholar