No CrossRef data available.
Article contents
Deep-UV Transparent Conductive β-Ga2O3 Film
Published online by Cambridge University Press: 21 March 2011
Abstract
Deep ultraviolet transparent and electrical conductive β-Ga2O3 film was prepared on SiO2 glass substrate. The film had electric conductivity of 1 Scm−1, carrier density of 1.4 × 1019cm−3 and mobility of 0.44 cm2V−1s−1. Internal transmittance at wavelength of 248 nm exceeded 50 %. Conductivity was enhanced at an oxygen pressure less than 10−4 Pa, and transparency appeared at a substrate temperature over 800 °C.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2001