Skip to main content Accessibility help
×
Home
Hostname: page-component-7ccbd9845f-z5z76 Total loading time: 0.254 Render date: 2023-01-29T00:47:13.679Z Has data issue: true Feature Flags: { "useRatesEcommerce": false } hasContentIssue true

Crystallization of Amorphous Silicon-Aluminum thin Films: IN-SITU Observation and Thermal Analysis.

Published online by Cambridge University Press:  21 February 2011

Toyohiko J. Konno
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
Robert Sinclair
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
Get access

Abstract

The crystallization of sputter-deposited Si/Al amorphous alloys was examined by transmission electron microscopy (TEM) and differential scanning calorimetry (DSC). In-situ high-resolution TEM reveals the existence of an Al layer between the amorphous matrix and the growing crystalline phase. The activation energy for the growth is about 1.2eV, roughly corresponding to the activation energy of Si diffusion in Al. These two observations support the view that a crystallization mechanism, in which an Al buffer layer provides the shortest reaction path, is responsible for the reaction. The product microstructure exhibits secondary crystallization at a higher temperature.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Herold, U. and Koster, U., Rapidly Quenched Metals III, edited by Cantor, B., The Metals Society, London, vol. 1, p. 281290 (1978)Google Scholar
2. Koster, U. and Weiss, P., J.Non-Cryst Solids, 17, 359368 (1975)CrossRefGoogle Scholar
3. McCaldin, J. O. and Sankur, H., Appl. Phys. Lett., 12, 524527 (1971)CrossRefGoogle Scholar
4. Koster, U., Acta Metall., 20, 13611370 (1972)CrossRefGoogle Scholar
5. Barbee, T. W. Jr and Keith, D. L., in Synthesis and Properties of Metastable Phases, edited by Machlin, E.S. and Rowland, T.J., The Metallugical Society of AIME, 93113 (1980)Google Scholar
6. Bravman, J. C. and Sinclair, R., J. Electron Microscope Technique, 1, 5361 (1984)CrossRefGoogle Scholar
7. Roberts, S. and Dobson, P. J., Thin Solid Films, 135, 137148 (1986)CrossRefGoogle Scholar
8. Konno, T. J. and Sinclair, R., Mats. Res. Soc. Proc., 230, in press (1992)Google Scholar
9. Morgiel, J., Wu, I. W., Chiang, A. and Sinclair, R., Mats. Res. Soc. Proc., 182, 191194 (1990)CrossRefGoogle Scholar
10. Zellama, K., Germain, P., Squelard, S., Bourgoin, J. C and Thomas, P. A., J. Appl. Phys., 50, 69957000(1979)CrossRefGoogle Scholar

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Crystallization of Amorphous Silicon-Aluminum thin Films: IN-SITU Observation and Thermal Analysis.
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Crystallization of Amorphous Silicon-Aluminum thin Films: IN-SITU Observation and Thermal Analysis.
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Crystallization of Amorphous Silicon-Aluminum thin Films: IN-SITU Observation and Thermal Analysis.
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *