Published online by Cambridge University Press: 10 February 2011
Experimental results are shown for the structural and stress behaviors of c-axis oriented barium hexaferrite films on c-plane sapphire (Al2O3) substrates as a function of oxygen growth pressure and film thickness. It is shown that films deposited at 20 mTorr crack and delaminate at thicknesses above 15 µm, but that evidence for these large stresses is not apparent in either substrate curvature measurements or distortion of the c-axis lattice constant for thinner films (< 2 µm). In contrast, films (< 4 µm) deposited at 300 mTorr show large substrate curvatures that relax with increasing film thickness, in tandem with the formation of first large outgrowths, and then polycrystalline grains as the original c-axis film texture is randomized. Correlations between these observations are made to explain the complex evolution of properties in these films.
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