Skip to main content Accessibility help
×
Home

Correlations between island nucleation and grain growth for polycrystalline films

Published online by Cambridge University Press:  21 March 2011

C. Eisenmenger-Sittner
Affiliation:
Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstraβe 8-10 A-1040 Vienna, Austria
A. Bergauer
Affiliation:
Institut für Angewandte und Technische Physik, Technische Universität Wien, Wiedner Hauptstraβe 8-10 A-1040 Vienna, Austria
Get access

Abstract

For Physical Vapor Deposition (PVD) processes the nucleation and growth of stable islands on monocrystalline and even polycrystalline substrates can be described by the rate equation theory in a mean field approximation. The observable quantity which can be derived from the rate equations is the global density of stable islands. Interisland correlations and island size distributions, on the other hand, cannot be obtained from this formalism. The array of stable islands, in turn, forms the template for the subsequent growth of a polycrystalline thin film. For the initial grain shape and grain size therefore both, the global island density as well as possible interisland correlations play a key role.

This paper presents the results of simulations which take into account the effects of both, the global island density as well as island/island correlations on the growth of a thick polycrystalline film. The simulations consist of two steps: first a polycrystalline template is generated from an initial distribution of stable islands by employing an algorithm for the construction of Voronoi-zones. The Voronoi zone network mimics the state of the film just after island coalescence and just before the onset of grain growth. Then the well known q-state Potts model of grain growth is employed to study the further steps of microstructural evolution.

A higher initial island density leads to a faster onset of grain growth while a very homogenous distribution of islands significantly retards grain growth. The reasons for these effects are briefly discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Venables, J. A., Spiller, G. D. T., Hanbücken, M., Rep. Prog. Phys. 47 399 (1984).CrossRefGoogle Scholar
2. Bartelt, M. C., Evans, J. V., Phys. Rev. B 46 12675 (1992).CrossRefGoogle Scholar
3. Bales, G. S., Chrzan, D. C., Phys. Rev. B 50(9) 6057 (1994)CrossRefGoogle Scholar
4. Mulheran, P. A., Blackman, J. A., Philos. Mag. Lett. 72(1) 55 (1995).CrossRefGoogle Scholar
5. Mulheran, P. A., Blackman, J. A. Phys. Rev. B 53(15) 10261 (1996).CrossRefGoogle Scholar
6. Anderson, M. P., Srolovitz, D. J., Grest, G. S., Sahni, P. S., Acta metall. 32(5) 783 (1984).CrossRefGoogle Scholar
7. Srolovitz, D. J., J. Vac. Sci. Technol. A4(6) 2925 (1986).CrossRefGoogle Scholar
8. Sahni, P. S., Srolovitz, D. J., Grest, G. S., Anderson, M. P., Safran, S. A., Phys. Rev. B 28(5) 2705 (1983).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 9 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 16th January 2021. This data will be updated every 24 hours.

Hostname: page-component-77fc7d77f9-2nq4t Total loading time: 0.314 Render date: 2021-01-16T04:05:41.943Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags last update: Sat Jan 16 2021 04:00:44 GMT+0000 (Coordinated Universal Time) Feature Flags: { "metrics": true, "metricsAbstractViews": false, "peerReview": true, "crossMark": true, "comments": true, "relatedCommentaries": true, "subject": true, "clr": true, "languageSwitch": true, "figures": false, "newCiteModal": false, "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Correlations between island nucleation and grain growth for polycrystalline films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Correlations between island nucleation and grain growth for polycrystalline films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Correlations between island nucleation and grain growth for polycrystalline films
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *