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Computer-Controlled Fabrication of Concentric Multilayer Fresnel Zone Plate for Synchrotron Radiation Hard X-Ray

Published online by Cambridge University Press:  17 March 2011

Masato Yasumoto
Affiliation:
Photonics Research Institute, AIST, AIST Tsukuba Central2, Tsukuba 305-8568, Japan Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Shigeharu Tamura
Affiliation:
Photonics Research Institute, AIST, AIST Kansai, Ikeda Osaka 563-8577, Japan Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Nagao Kamijo
Affiliation:
Kansai Medical University, Uyama-higashi, Hirakata, Osaka, 573-1136, Japan Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Yoshio Suzuki
Affiliation:
Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Mitsuhiro Awaji
Affiliation:
Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Akihisa Takeuchi
Affiliation:
Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Hidekazu Takano
Affiliation:
Japan Synchrotron Radiation Research Institute(SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Yoshiki Kohmura
Affiliation:
Riken Harima Institute (SPring-8), Mikazuki-cho, Hyogo, 679-5198, Japan
Katsumi Handa
Affiliation:
Ritsumeikan University, Noji-higashi, Kusatsu, Shiga, 525-8577, Japan
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Abstract

A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

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