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A Compact Nuclear Microprobe With a Liquid Metal Ion Source and a Toroidal Analyzer

Published online by Cambridge University Press:  15 February 2011

Mikio Takai
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, 560 Osaka, Japan.
Ryou Mimura
Affiliation:
EIKO Engineering Co., Ltd., 50 Yamazaki, Nakaminato, Ibaraki 311-12, Japan.
Hiroshi Sawaragi
Affiliation:
EIKO Engineering Co., Ltd., 50 Yamazaki, Nakaminato, Ibaraki 311-12, Japan.
Ryuso Aihara
Affiliation:
EIKO Engineering Co., Ltd., 50 Yamazaki, Nakaminato, Ibaraki 311-12, Japan.
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Abstract

A nondestructive three-dimensional RBS/channeling analysis system with an atomic resolution has been designed and is being constructed in Osaka University for analysis of nanostructured surfaces and interfaces. An ultra high-vacuum sample-chamber with a threeaxis goniometer and a toroidal electrostatic analyzer for medium energy ion scattering (MEIS) was combined with a short acceleration column for a focused ion beam. A liquid metal ion source (LMIS) for light metal ions such as Li+ or Be+ was mounted on the short column.

A minimum beam spot-size of about 10 nm with a current of 10 pA is estimated by optical property calculation for 200 keV Li+ LMIS. An energy resolution of 4 × 10-3 (AE/E) for the toroidal analyzer gives rise to atomic resolution in RBS spectra for Si and GaAs. This system seems feasible for atomic level analysis of localized crystalline/disorder structures and surfaces.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

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