Skip to main content Accessibility help
×
Home
Hostname: page-component-559fc8cf4f-6pznq Total loading time: 0.384 Render date: 2021-02-25T09:02:28.294Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

Chemical Vapor Deposition of Epmtaxial BaTiO3 Films for Frequency Doubling Devices

Published online by Cambridge University Press:  21 February 2011

Peter C. Van Buskirk
Affiliation:
Advanced Technology Materials, Danbury, CT
Gregory T. Stauf
Affiliation:
Advanced Technology Materials, Danbury, CT
Robin Gardiner
Affiliation:
Advanced Technology Materials, Danbury, CT
Peter S. Kirlin
Affiliation:
Advanced Technology Materials, Danbury, CT
B. Bihari
Affiliation:
University of Massachusetts-Lowell, G. Gallatin
J. Kumar
Affiliation:
University of Massachusetts-Lowell, G. Gallatin
Get access

Abstract

Ferroelectric materials such as BaTiO3 are notable for their nonlinear optical and electrical properties. Optical frequency doubling in thin films integrated with compact semiconductor laser pumped solid state lasers is an attractive candidate for high efficiency generation of blue light. Chemical vapor deposition (CVD) using a single liquid source has been used to grow BaTiO3 films on MgO. X-ray diffraction in the pole figure configuration indicates the films to be epitaxial, and rocking curves had FWHM ≈ 0.7°. An optical scatterometer (λ = 633 nm.) has been used to identify deposition conditions that result in the lowest scatter losses. This paper describes these results as well as waveguide designs to enhance the second harmonic generation efficiency in epitaxial BaTiO3 films on MgO.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below.

References

1 Landolt-Bornstein Numerical Data and Functional Relationships in Science and Technoloey, New Series, IIEI/1, Hellwege, K.H., ed., pp. 682, 685 (1979)Google Scholar
2 Non-critical phase matching (Type II) is disallowed in uniaxial materials with 4mm symmetry, and critical phase matching (Type I) is possible only at wavelengths greater than λ. - 2.0μ. Private communication with Keith Kendall, Pennsylvania State University.Google Scholar
3Desirability of electro-optic materials for guided-wave optics”, Holman, R.L., Johnson, L.M., Skinner, D.P., Optical Eng., 26(2), pp. 134142 (1987)CrossRefGoogle Scholar
4 Subsequent technical obstacles may include photorefractive effects (“optical damage”) and difficulties in microlithographic fabrication of the structures.Google Scholar
5 At λ. = 1.06μ for bulk single crystals, nBT = 2.322 and nSW = 2.315. A related problem is the magnitude of both the SrTi03 and BaTiO3 refractive indices compared to air at the outer interface. A high index film deposited on top of the BaTi03 can reduce its required thickness, but adds undesirable complexity.Google Scholar
6Properties and applications of layered grating resonances”, Gallatin, G.M., SPIE Proc. Vol. 815, 158 (1987)CrossRefGoogle Scholar
7Microstucture of BaTiO3Thin Films Grown by Reduced-pressure CVD”, Van Buskirk, P.C., Gardiner, R., Kirlin, P.S., Proceedings, MRS Fall Meeting (1990), Boston MA., to be publishedGoogle Scholar
8Single Liquid Source Plasma Enhanced Metalorganic Chemical Vapor Deposition of High-quality YBA2CU 307-1 Thin Films”, Zhang, Jiming, Gardiner, Robin A., Kirlin, Peter S., Boerstler, Robert W., and Steinbeck, John, Appl. Phys. Lett. 61, 2884 (1992).Google Scholar
9MOCVD growth of BaTiO3 in an 8” single wafer CVD system”, Van Buskirk, P.C., Gardiner, R., Kirlin, P.S., Krupanidhi, S.B., Proceedings, 8 th Int. Syp. Applications of Ferroelectrics, August 31-Sept. 2, 1992, Greenville SC, 340343 Google Scholar
10 In addition, we have used this technique to deposit BaTiO3, TlBaCaCuO, LaSrCo03, Cr205, MgAI204, Y203-ZrO2(YSZ) and PbLaZrTi03. We have also demonstrated reagent delivery for CVD of Ta205 and Cu.Google Scholar
11 An optical reflectance thickness monitor may be used if it becomes necessary for more precise control.Google Scholar
12 Communication with Angus Kingon, NCSU.Google Scholar
13Dependence of the Crystal Structure on Particle Size in Barium Titanate”, Uchino, K., Sadanaga, E., Hirose, T., J American Ceramic Society, 72(8), 1558 Google Scholar
14Dielectric properties of fine-grained barium titanate ceramics”, Arflt, G., Hennings, D., de With, G., J. Appl. Phys., 58(4) 16201625 (1985)Google Scholar
15 Ibid. Ref. 1.Google Scholar
16 The back surface of each sample was roughened on 600 grit sandpaper and painted black to reduce contribution of the back surface to the signal. 17 The detector was used in a photoconductive mode, and a beam chopper and lock-in amplifier were used to reduce noise.Google Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 5 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 25th February 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Chemical Vapor Deposition of Epmtaxial BaTiO3 Films for Frequency Doubling Devices
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Chemical Vapor Deposition of Epmtaxial BaTiO3 Films for Frequency Doubling Devices
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Chemical Vapor Deposition of Epmtaxial BaTiO3 Films for Frequency Doubling Devices
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *