Skip to main content Accessibility help
×
Home

Characterization of SiGe Alloy Nanocrystallites Prepared by Pulsed Laser Ablation in Inert Gas Ambient

Published online by Cambridge University Press:  15 February 2011


Yuka Yamada
Affiliation:
Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc., 3–10–1 Higashimita, Tama-ku, Kawasaki 214, Japan, yyamada@mrit.mei.co.jp
Takaaki Orii
Affiliation:
Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305, Japan
Takehito Yoshjda
Affiliation:
Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc., 3–10–1 Higashimita, Tama-ku, Kawasaki 214, Japan, yyamada@mrit.mei.co.jp
Corresponding
E-mail address:

Abstract

We report nanometer-sized silicon germanium (SiGe) alloy crystallites prepared by excimer laser ablation in constant-pressure inert gas. Size distribution of the SixGelxultrafine particles decreases with decreasing x under fixed conditions of deposition such as ambient gas pressure. Raman scattering spectra of the deposited SiGe ultrafine particles show three peaks intrinsic to crystalline SiGe alloys, and the linewidths of these peaks broaden due to the reduced size of the crystallites. Furthermore, a visible photoluminescence (PL) band with a peak at around 2.2 eV is obtained at room temperature after an annealing process.


Type
Research Article
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below.

References

1.Furukawa, S. and Miyasato, T., Jpn. J. Appl. Phys. 27, L2207 (1988).CrossRefGoogle Scholar
2.Takagi, H., Ogawa, H., Yamazaki, Y., Ishizaki, A., and Nakagiri, T., Appl. Phys. Lett. 56, 2379 (1990).CrossRefGoogle Scholar
3.Canham, L.T., Appl. Phys. Lett. 57, 1046 (1990).CrossRefGoogle Scholar
4.Maeda, Y., Tsukamoto, N., Yazawa, Y., Kanemitsu, Y., and Masumoto, Y., Appl. Phys. Lett. 59, 3168 (1991).CrossRefGoogle Scholar
5.Porous Silicon, edited by Feng, Z.C. and Tsu, R. (World Scientific, Singapore, 1994).CrossRefGoogle Scholar
6.Braunstein, R., Moore, A.R., and Herman, F., Phys. Rev. 109, 695 (1958).CrossRefGoogle Scholar
7.Gardelis, S., Rimmer, J.S., Dawson, P., Hamilton, B., Kubiak, R.A., Whall, T.E., and Parker, E.H.C., Appl. Phys. Lett. 59, 2118 (1991).CrossRefGoogle Scholar
8.Ksendzov, A., Fathauer, R.W., George, T., Pike, W.T., Vasquez, R.P., and Taylor, A.P., Appl. Phys. Lett. 63, 200 (1993).CrossRefGoogle Scholar
9.Werwa, E., Seraphin, A.A., Chiu, L.A., Zhou, Chuxin, and Kolenbrander, K.D., Appl. Phys. Lett. 64, 1821 (1994).CrossRefGoogle Scholar
10.Ohyanagi, T., Miyashita, A., Murakami, K., and Yoda, O., Jpn. J. Appl. Phys. 33, 2586 (1994).CrossRefGoogle Scholar
11.Yoshida, T., Takeyama, S., Yamada, Y., and Mutoh, K., Appl. Phys. Lett. 68, 1772 (1996).CrossRefGoogle Scholar
12.Yamada, Y., Orii, T., Umezu, I., Takeyama, S., and Yoshida, T., Jpn. J. Appl. Phys. 35, 1361 (1996).CrossRefGoogle Scholar
13.Pulsed Laser Deposition of Thin Films, edited by Chrisey, D.B. and Hubler, G.K. (Wiley, New York, 1994).Google Scholar
14.Antoni, F., Fogarassy, E., Fuchs, C., Grob, J.J., Prevot, B., and Stoquert, J.P., Appl. Phys. Lett. 67, 2072 (1995).CrossRefGoogle Scholar
15.Renucci, M.A., Renucci, J.B., and Cardona, M., in Light Scattering in Solids, edited by Balkanski, M. (Flammarion, Paris, 1971), p. 326.Google Scholar
16.Brya, W.J., Solid State Commun. 12, 253 (1973).CrossRefGoogle Scholar
17.Richter, H., Wang, Z.P., and Ley, L., Solid State Commun. 39, 625 (1981).CrossRefGoogle Scholar
18.Yoshida, T., Yamada, Y., Takeyama, S., Orii, T., Umezu, I., and Makita, Y., Proc. SPIE 2888, 6 (1996).CrossRefGoogle Scholar
19.Campbell, I.H. and Fauchet, P.M., Solid State Commun. 58, 739 (1986).CrossRefGoogle Scholar
20.Okada, R. and Iijima, S., Appl. Phys. Lett. 58, 1662 (1991).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 10 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 5th December 2020. This data will be updated every 24 hours.

Hostname: page-component-b4dcdd7-qjxlp Total loading time: 0.365 Render date: 2020-12-05T23:22:57.314Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags last update: Sat Dec 05 2020 23:01:17 GMT+0000 (Coordinated Universal Time) Feature Flags: { "metrics": true, "metricsAbstractViews": false, "peerReview": true, "crossMark": true, "comments": true, "relatedCommentaries": true, "subject": true, "clr": false, "languageSwitch": true }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Characterization of SiGe Alloy Nanocrystallites Prepared by Pulsed Laser Ablation in Inert Gas Ambient
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Characterization of SiGe Alloy Nanocrystallites Prepared by Pulsed Laser Ablation in Inert Gas Ambient
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Characterization of SiGe Alloy Nanocrystallites Prepared by Pulsed Laser Ablation in Inert Gas Ambient
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *