Skip to main content Accessibility help
×
Home

Analysis of Reflection High Energy Electron Diffraction Pattern of Silicon Carbide Grown on Silicon

Published online by Cambridge University Press:  21 February 2011

G. Teichert
Affiliation:
TU Ilmenau, Institut für Werkstoffe, Postfach 0565, D-98684 Ilmenau, Germany
J. Pezoldt
Affiliation:
TU Ilmenau, Institut für Festkörperelektronik, Postfach 0565, D-98684 Ilmenau, Germany
V. Cimalla
Affiliation:
TU Ilmenau, Institut für Festkörperelektronik, Postfach 0565, D-98684 Ilmenau, Germany
O. Nennewitz
Affiliation:
TU Ilmenau, Institut für Werkstoffe, Postfach 0565, D-98684 Ilmenau, Germany
L. Spiess
Affiliation:
TU Ilmenau, Institut für Werkstoffe, Postfach 0565, D-98684 Ilmenau, Germany
Get access

Abstract

RHEED pattern of SiC layers on both (100) and (111)Si grown by carbonization were studied. Different deviations from the single crystalline structure were found ranging from twinning up to changes in the orientation and textured growth. Special attention was drawn on lattice relaxation and morphology evolution during the growth of the formed SiC. Relationships between the occurrence of typical RHEED pattern and the morphology and process parameters are presented.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below.

References

1 Nishino, S., Hazuki, Y., Matsunami, H. and Tanaka, T., J. Electrochem. Soc., 127 2674 (1980).CrossRefGoogle Scholar
2 Cimalla, V., Pezoldt, J., Ecke, G., Rößler, H. and Eichhorn, G., J. Phys. IV, Colloq. C5, suppl. J. Phys. II, 5 C5863(1995).Google Scholar
3 Becker, J.P., Long, R.G. and Mahan, J.E., J. Vac. Sci. Technol. A12 174 (1994).CrossRefGoogle Scholar
4 Niles, D.V. and Höchst, H., Mater. Res. Soc. Symp. Proc., 208, 243 (1991).CrossRefGoogle Scholar
5 Ball, C.A.B., van der Merve, J.H., in Dislocations in Solids, Vol. 6, edited by Nabarro, F.R.N. (North-Holland, Amsterdam, 1983), Chap. 27.Google Scholar
6 Tu, K.-N., Mayer, J.W. and Feldman, L.C.,Electronic Thin Film Science for Electrical Engineers and Material Scientists (Macmillan Publishing Company, New York, 1976), p. 166.Google Scholar
7 Cimalla, V. and Pezoldt, J., Mater. Res. Soc. Symp. Proc., 355, 33 (1995).CrossRefGoogle Scholar
8 Steckl, A.J., Mogren, S.A., Roth, M.W. and Li, J.P., Appl. Phys. Lett., 60 1495 (1992).CrossRefGoogle Scholar
9 Maeda, K., Suzuki, K., Fujita, S., Ichihara, M. and Hyodo, S, Phil. Mag., A57 573 (1988).CrossRefGoogle Scholar
10 Chevrier, J., Cruz, A., Berbezier, I. and Derrien, J., Acta Phys. Slovaca, 44 227 (1994).Google Scholar
11 Yang, H.-N., Wang, G.-C. and Lu, T.-M., Diffraction from Rough Surfaces and Dynamic Growth Fronts (World Scientific, Singapore, 1993), Chap. VI.CrossRefGoogle Scholar
12 Joyce, B.A., Neave, J.H., Dobson, P.J. and Larsen, P.K., Phys. Rev., B29, 814 (1984).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 10 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 20th January 2021. This data will be updated every 24 hours.

Hostname: page-component-76cb886bbf-2rmft Total loading time: 1.647 Render date: 2021-01-20T04:34:34.143Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Analysis of Reflection High Energy Electron Diffraction Pattern of Silicon Carbide Grown on Silicon
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Analysis of Reflection High Energy Electron Diffraction Pattern of Silicon Carbide Grown on Silicon
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Analysis of Reflection High Energy Electron Diffraction Pattern of Silicon Carbide Grown on Silicon
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *