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An Overview of Laser Chemical Processing

Published online by Cambridge University Press:  28 February 2011

Richard M. Osgood Jr
Affiliation:
Microelectronics Sciences Laboratories and Columbia Radiation Laboratory, Columbia University, New York, NY 10027
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Abstract

A overview of the recent developments in laser chemical processing is provided. The review covers advances in understanding fundamental process physics, the development of new techniques, and the implementation of applications.

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Articles
Copyright
Copyright © Materials Research Society 1987

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References

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