Skip to main content Accessibility help

We use cookies to distinguish you from other users and to provide you with a better experience on our websites. Close this message to accept cookies or find out how to manage your cookie settings.

Close cookie message
×
Home
  • Home
EnglishFrançais
MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

Article contents

An Improvement of the Doerner-Nix Function for Substrate Effects in Ultrathin Films

Published online by Cambridge University Press:  01 February 2011

BO Zhou  and
Barton C Prorok
BO Zhou
Affiliation:
prorok@auburn.edu, Auburn University, Materials Engineering, 275 Wilmore Lab, Auburn, AL, 36849-5341, United States, 334-844-4733
Barton C Prorok
Affiliation:
prorok@auburn.edu, Auburn University, Auburn, AL, 36849-5341, United States
Corresponding
E-mail address:
prorok@auburn.edu
Get access

Abstract

Substrate effects continue to be the key issue in interrogating thin films by nanoindentation. In this study, we studies amorphous thin films of several different materials deposited onto a silicon wafer. These materials span from being considerable softer than the substrate to films significantly harder than the substrate. The thin film Young's modulus Ef was measured with a MTS Nanoindenter XP system using the continuous stiffness measurement (CSM). The so-called “flat region” was observed in the early stage of nearly every CSM modulus-displacement curve for all materials studied. The depth of this region (hcr ) was found to vary with the material. Based on the experimental data, we were able to modify the Doerner & Nix model for thin film indentation on a substrate, particularly their parameter alpha (α). The modified relation was found to be adept at closely matching all experimental data collected, which spanned both soft films on hard substrates and hard films on soft substrates.

Keywords

elastic properties thin film amorphous
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1086: Symposium U – Mechanics of Nanoscale Materials , 2008 , 1086-U05-08
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below.
If you should have access and can't see this content please contact technical support.

References

1 Pharr, G.M., Instrumented Indentation Testing, in ASM Handbook. 2000. pp. 232–243.Google Scholar
2 Buckle, H., “The science of hardness testing and its research applications.” ASM, Metals Park, OH, 1973 Google Scholar
3 Loubet, J.L., Georges, J.M., Marchesini, O., and Meille, G., J. Tribology (Trans. ASME), Vol 106 43 (1984)CrossRefGoogle Scholar
4 Pharr, G., Oliver, W.C. Mater. Res. Soc. Bull. 17 28 (1992)CrossRefGoogle Scholar
5 Prorok, B.C., Micro-and Nanomechanics, Encyclopedia Nanonsci. & Nanotech. V5 555-600Google Scholar
6 Pethica, J.B., Hutchings, R., Oliver, W.C., Philos. Mag. A 48 593 (1983)CrossRefGoogle Scholar
7 Jiang, X., Zou, J. W., Reichelt, K., Grunberg, P., J. Appl. Phys. 66 4729 (1989)CrossRefGoogle Scholar
8 Pharr, G.M., Callahan, D.L., Robertson, J., et al., Appl. Phys. Lett. 68 779 (1996)CrossRefGoogle Scholar
9 Bulychev, S.I., Alekhin, V.P., Shorshorov, M.Kh., Ternovskii, A.P., and Shnyrev, G.D., Zavod. Lab., Vol 41 (No. 9), 1137–1140 (1975)Google Scholar
10 Frohlich, F., Grau, P., and Grellmann, W., Phys. Status Solidi (a), Vol 42, 79–89 (1977)CrossRefGoogle Scholar
11 Shorshorov, M. Kh., Bulychev, S.I., and Alekhin, V.P., Sov. Phys. Dokl., Vol 26 (No. 8), 769–771 (1982)Google Scholar
12 Pethica, J.B., Hutchings, R., and Oliver, W.C., Philos. Mag. A, Vol 48 (No. 4), 593–606 (1983)CrossRefGoogle Scholar
13 Oliver, W.C., MRS Bull., Vol 11 (No. 5), 15–19 (1986)CrossRefGoogle Scholar
14 Pollock, H.M., Maugis, D., and Barquins, M., ASTM, 47–71 (1986)Google Scholar
15 Nix, W.D., Metall. Trans. A, Vol 20, 2217–2245 (1989)CrossRefGoogle Scholar
16 Doerner, M.F. and Nix, W.D., J. Mater. Res., Vol 1, 601–609 (1986)CrossRefGoogle Scholar
17 King, R.B., Int. J. Solids Structures 23, 1657–1664 (1987)CrossRefGoogle Scholar
18 Saha, R. and Nix, W.D., Acta Mater. 50, 23 (2002)CrossRefGoogle Scholar
19 Gao, H., Chiu, C.H., and Lee, J., Int. J. Solids Structures 29, 2471–2492 (1992)Google Scholar
20 Mencik, J., Munz, D., Quant, E., and Weppelmann, E.R., J. Mater. Res. Vol. 12, No. 9, 1997 CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 10 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 22nd January 2021. This data will be updated every 24 hours.

1 Cited by
Hostname: page-component-76cb886bbf-86jzp Total loading time: 0.227 Render date: 2021-01-22T01:22:35.386Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

An Improvement of the Doerner-Nix Function for Substrate Effects in Ultrathin Films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

An Improvement of the Doerner-Nix Function for Substrate Effects in Ultrathin Films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

An Improvement of the Doerner-Nix Function for Substrate Effects in Ultrathin Films
Available formats
×
×

Reply to: Submit a response

Your details

Conflicting interests

Do you have any conflicting interests? *