Skip to main content Accessibility help
×
Home

Adhesion force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films

Published online by Cambridge University Press:  01 February 2011


Nam-Kyun Kim
Affiliation:
Dept. of Metallurgy and Materials Eng., Hanyang University, Ansan, 425–791, Korea
Tae-Gon Kim
Affiliation:
Dept. of Metallurgy and Materials Eng., Hanyang University, Ansan, 425–791, Korea
Jin-Goo Park
Affiliation:
Dept. of Metallurgy and Materials Eng., Hanyang University, Ansan, 425–791, Korea
Woon-Bae Kim
Affiliation:
Samsung Advanced Institute of Technology, Suwon, 440–600, Korea
Hyung- Jae Shin
Affiliation:
Samsung Advanced Institute of Technology, Suwon, 440–600, Korea

Abstract

In this study, Adhesion force and Nanotribological Characteristics of fluorocarbon (FC) films on Al deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) were evaluated. The contact angle of FC thin films on Al was measured to be around 110°. The surface energy was calculated to be 15 dynes/cm from the measurements of contact angles of polar and nonpolar solutions on surfaces. The contact angle hysteresis, which is an indicator for the surface heterogeneity, was lower than 30°. The friction force of FC films coated surfaces was three times lower than bare Al. The adhesion force of bare Al was measured to be around 9.6nN. The presence of FC films on Al reduced it to below 4nN. Fourier transform infra-red (FTIR) spectra showed the presence of fluorocarbon groups such as –CFn- and =CF=CF2.


Type
Research Article
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Gangal, S. V., in: Mark, H. F. Ed., Encyclopedia of Polymer Science and Engineering, Vol. 16, 2nd Ed., Wiley, New York, 1989, p. 577.Google Scholar
2. Houston, M. R., Maboudian, R., How, R. T, Self-assembled Monolayer Films as Durable Antistiction Coatings for Polysilicon Microstructures, IEEE Solid-State Sensor and Actuator Workshop, 1996, pp 4247 Google Scholar
3. Owens, D. K., Wendt, R. C., J. Appl. Polym. Sci., 13, 1969.CrossRefGoogle Scholar
4. Ulman, A., An Introduction Ultra thin Organic Films from Langmuir Blodgett to Self-Assembly, Academic Press, San Diego, 1991, p. 48.Google Scholar
5. Yuan, H. R., Hichwa, B. P., Allen, T. H., J. Vac. Sci. Technol. A 16 (5) (1998) 3119.CrossRefGoogle Scholar
6. Good, R. J., in: Mittal, K.L. (Ed), Contact Angle, Wettability and Adhesion, VSP, Utrecht, The Netherlands, 1993, p. 3 Google Scholar
7. Nigel, K. P., Theirich, D., Engemann, J., Surface Coating Technol., 98 (1988) 11421147 CrossRefGoogle Scholar
8. Li, Xi, Hua, Xuefeng, Li Ling journal of Vac Sci Technol. A 20(6), 2002 pp 20522061 CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 4 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 2nd December 2020. This data will be updated every 24 hours.

Hostname: page-component-79f79cbf67-td25k Total loading time: 6.668 Render date: 2020-12-02T10:59:31.767Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags last update: Wed Dec 02 2020 10:04:35 GMT+0000 (Coordinated Universal Time) Feature Flags: { "metrics": true, "metricsAbstractViews": false, "peerReview": true, "crossMark": true, "comments": true, "relatedCommentaries": true, "subject": true, "clr": false, "languageSwitch": true }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Adhesion force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Adhesion force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Adhesion force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *