Skip to main content Accessibility help
×
Home

Ablation-Induced Stresses in Fused Silica by 157-nm F2-Laser irradiation

  • Igor A. Konovalov (a1) and Peter R. Herman (a1)

Abstract

The F2laser is a promising source for direct etching of microstructures and the precise shaping of optical-grade surfaces on wide bandgap materials such as fused silica. We report here on residual tensile stresses induced in fused silica (Coming 7940, UV grade) by 157-nm laser ablation. Plastic strain of 160-mm thick rectangular strips, monitored with an optical interferometric microscope, revealed the presence of residual tensile stresses in the near-ablated surface. HF chemical thinning of the sample showed the thickness of ablation-affected layer provoking strain was ∼275 nm, a value independent of laser fluence (1.9-4.7 J/cm2) and scanning speed (94 - 220 µm/s). A near-surface mean residual tensile stress of ∼80 MPa was inferred from a thin film-substrate approximation.

Copyright

References

Hide All
1 Thin Films: Stresses and Mechanical Properties I to VII, MRS Proc. 130 (1988); 188(1990); 239(1991); 308(1993); 356(1994); 436(1996); 505(1997); 646(1998).
2 Braren, B., Srinivasan, R., J. Vac. Sci. Technol., B6, 537 (1988).
3 Ihlemann, J., Appl. Surf Sci., 54, 193 (1992).
4 Buerhop, C. Weissmann, R., Appl. Surf Sci., 54, 187 (1992).
5 Dyer, P.E., Farley, R.J., Giedl, R. Karnakios, D.M., Appl. Surf Sci., 96–98, 537 (1996).
6 Zang, J., Sugioka, K., Wada, S., Tashiro, H., Toyoda, K., Jpn. J. Appl. Phys. 35, L1422 (1996).
7 Tkigawa, Y., Kurosawa, K., Sasaki, W., Okuda, M., Yoshida, K., Fujiwara, E., Kato, Y., Inoue, Y., J. Non-Crystal. Solids, 125, 107 (1990).
8 Sugioka, K., Wada, S., Ohnuma, Y., Nakamura, A., Tashiro, H., Toyoda, K., Appl. Surf Sci., 96–98, 347 (1996).
9 Sugioka, K., Wada, S., Tsunemi, A., Sakai, T., Takai, H., Moriwaki, H., Nakamura, A., Tashiro, H., Toyoda, K., Jpn. J. Appl. Phys. 32, 6185 (1993).
10 Herman, P.R., Chen, B., Moore, D.J., Canaga-Retnam, M., MRS Proc. 236, 53 (1992).
11 Herman, P.R., Beckley, K., Jackson, B., Kurosawa, K., Moore, D., Yamanishi, T., Yang, J. H., SPIE Proc. 2992, 86 (1997).
12 Herman, P. R., Marjoribanks, R.S., Oettl, A., Chen, K., Konovalov, I., Ness, S., Appl. Surf. Sci., 154–155, 577 (2000).
13 Borrelli, N.F., Smith, C., Allan, D.C., Seward, T.P., J. Opt. Soc. Am., B14, 1606 (1997).
14 Cochran, E. R., Ai, C., Appl. Optics, 31, 6702 (1992).
15 Dahmani, F., Schmid, A.W., Lambropoulos, J.C., Burns, S., Appl. Optics, 37, 7772 (1998).
16 Guignard, F., Autric, M.L., Baudinaud, V., SPIE Proc., 3343, 534 (1998).
17 Hoffmnan, R.W., in ’Physics of Thin Films’, ed. Hassand, G and Thun, R.E., (Academic Press Inc., New York, 1966) 3, pp.211272.
18 Oliver, W.C., Pharr, G.M., J. Mater. Res., 7, 1564 (1992).
19 Dahmani, F., Lambrpoulos, J.C., Schmid, A.W., Papernov, S., Burns, S.J., J. Mater. Res., 14, 597 (1999).
20 Efimov, O.M., Glebov, L., Papernov, S., Schmid, A.W., SPIE Proc., 3578, 564 (1999).
21 Papernov, S., Zaksas, D., Anzellotti, J.F., Smith, D.J., Schimid, A.W., Collier, D.R., Carbone, F.A., SPIE Proc., 3244, 434 (1998).
22 Sakaguchi, S. Kimura, T., J. Am.Ceram.Soc., 64, 259 (1981).
23 Chandan, H.C. Kalish, D., J. Am.Ceram. Soc., 65, 171 (1982).

Ablation-Induced Stresses in Fused Silica by 157-nm F2-Laser irradiation

  • Igor A. Konovalov (a1) and Peter R. Herman (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed