Skip to main content Accessibility help
×
Home

(100) Oriented Platinum thin Films Deposited by Dc Magnetron Sputtering On SiO 2/Si Substrates

  • Dong-Yeon Park (a1), Dong-Su Lee (a1), Min Hong Kim (a2), Tae-Soon Park (a2), Hyun-Jung Woo (a1), Euijoon Yoon (a2), Dong-ll Chun (a1) and Jowoong Ha (a1)...

Abstract

Platinum(Pt) films were sputter-deposited on Si02/Si substrates under the mixed gas atmosphere of Ar and O2. Under certain deposition conditions, the films were oriented such that the (100) direction is normal to the substrate surface. The formation of the (100) texture was affected by the gas pressure and film thickness. After annealing at 650 °C for 1 hour, (100) oriented Pt films with the resistivity of pure Pt were obtained. The annealed Pt films all passed a tape adhesion test and had no defects such as hillocks or pinholes. The experimental results from this work are presented.

Copyright

References

Hide All
1. Okuyama, M. and Hamakawa, Y., Int. J. Eng. Sci., 29, 391 (1991)
2. Ogawa, T., Senda, A., Kasnami, T., Jap. J. of Appl. Phys., 30, 2145 (1991)
3. lijima, K., Tomita, Y., Takayama, R., and Ueda, I., J. Appl. Phys., 60, 361 (1986)
4. Kim, S. and Baik, S., J. Vac. Sci. Tech. A, 13, 95 (1995)
5. Narayan, J., Tiwari, P., Jagannadham, K., and Holland, O.W., Appl. Phys. Lett., 64, 2093 (1994)
6. Westwood, W. D. and Bennewitz, C. D., J. Appl. Phys., 45, 2313 (1974)
7. Lotgerling, F. K., J. Inorg. Nucl. Chem., 9, 113 (1959)
8. Van der Drift, A., Philips Res. Repts., 22, 267 (1967)
9. Ming, N. B. and Sunagawa, I., J. Cryst. Growth, 87, 13 (1988)
10. Gittis, A. and Dobrev, D., Thin Silid Films, 130, 335 (1985)
11. Pelleg, J., Zerin, L. Z., and , Lungo, Thin Silid Films, 117, 197 (1991)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed