Periodic 3D Structures Prepared by Photolithography

Greg Khitrov

doi:10.1557/mrs2002.209

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Periodic 3D Structures Prepared by Photolithography

Published online by Cambridge University Press: 31 January 2011

Greg Khitrov

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Type: Research/Researchers
Information: MRS Bulletin , Volume 27 , Issue 9: Hydrogen Storage , September 2002 , pp. 662

DOI: https://doi.org/10.1557/mrs2002.209 [Opens in a new window]
Copyright: Copyright © Materials Research Society 2002

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Periodic 3D Structures Prepared by Photolithography

Volume 27, Issue 9
Greg Khitrov
DOI: https://doi.org/10.1557/mrs2002.209

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Periodic 3D Structures Prepared by Photolithography

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