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Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection

  • C.P.M. Dunselman, W.M. Arnold Bik, F.H.P.M. Habraken and W.F. van der Weg

Abstract

The fundamentals of the high energy ion beam technique Elastic Recoil Detection are presented. The potential of this analysis technique for the depth-resolved determination of light elements in a heavy matrix is illustrated with examples from semiconductor technology.

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16.Bik, W.M. Arnoldet al., to be published.

Materials Analysis with High Energy Ion Beams Part III: Elastic Recoil Detection

  • C.P.M. Dunselman, W.M. Arnold Bik, F.H.P.M. Habraken and W.F. van der Weg

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