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Ion Implantation

  • S.T. Picraux and P.S. Peercy


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1. MRS Symposia Proceedings series: Metastable Materials Formation by Ion Implantation, edited by Picraux, S.T. and Choyke, W.J. (Vol. 7, 1982);
Ion implantation and Ion Beam Processing of Materials, edited by Hubler, G.K., Holland, O.W., Clayton, C.R., and White, C.W. (Vol. 27, 1984);
Ion Beam Processes in Advanced Electronic Materials and Device Technology, edited by Appleton, B.R., Eisen, F.H., and Sigmon, T.W. (Vol. 45, 1985);
Beam-Solid Interactions and Phase Transformations, edited by Kurz, H., Olson, G.L. and Poate, J.M. (Vol. 51, 1986); and
Semiconductor-on-Insulator and Thin Film Transistor Technology, edited by Chiang, A., Geiss, M.W., and Pfeiffer, L. (Vol. 53, 1986).
2.Proceedings of the 4th International Conference on Ion Beam Modification of Materials,” Nucl. Instrum. & Methods B7/8 (1985).
3.Surface Alloying by Ion, Electron and Laser Beams, edited by Rehn, L.E., Picraux, S.T., and Wiedersich, H. (American Society for Metals, Metals Park, Ohio, 1987).

Ion Implantation

  • S.T. Picraux and P.S. Peercy


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