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Fabrication of Porous Metal Bonded Diamond Grinding Wheels for Flat-Surface Nanomachining

  • Koji Matsumaru and Atsushi Takata

Extract

The articles thus far in this MRS Bulletin issue on Emerging Methods for Micro- and Nanofabrication have addressed the creation of structures or devices on a small scale. What is implicit in some of these articles is that a substrate of sufficient flatness is available upon which to build these structures in a controlled way. A related area, therefore, is the formation of these flat surfaces, as well as the development of the tools to make them.

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Fabrication of Porous Metal Bonded Diamond Grinding Wheels for Flat-Surface Nanomachining

  • Koji Matsumaru and Atsushi Takata

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