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Direct-Writing of Three-Dimensional Structures Using Laser-Based Processes

Published online by Cambridge University Press:  31 January 2011

M. Stuke ,
K. Mueller ,
T. Mueller ,
K. Williams ,
R. Oliver ,
D.A.A. Ohlberg ,
G. Fuhr  and
R. S. Williams
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Abstract

Three-dimensional structures of selected materials can be written directly to the precise locations required using laser exposure of suitable gaseous precursor mixtures. Writing speeds exceeding 50 μm/s can be achieved. Examples presented in this work include the creation of a tiny time-of-flight laser ionization mass spectrometer, laserdriven movable micro-objects, and an ac electric-field microcage for storage, handling, and transferring small neutral objects in aqueous solution. The impact for lasercontrolled site-selective growth of carbon nanotube cables is demonstrated.

Type
Research Article
Information
MRS Bulletin , Volume 32 , Issue 1: Laser Direct-Write Processing , January 2007 , pp. 32 - 39
Copyright
Copyright © Materials Research Society 2007

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