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Diamond and Amorphous Carbon MEMS

Published online by Cambridge University Press:  31 January 2011

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Extract

The designer of microelectromechanical systems (MEMS) can increase MEMS performance either by improved mechanical design or by the selection of a MEMS material with improved mechanical performance. In the quest to identify highperformance MEMS materials, diamond and amorphous carbon have recently emerged as a promising class of materials.

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Research Article
Copyright
Copyright © Materials Research Society 2001

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