Skip to main content Accessibility help
×
Home

Atom probe tomography of nanoscale electronic materials

  • D.J. Larson (a1), T.J. Prosa (a2), D.E. Perea (a3), K. Inoue (a4) and D. Mangelinck (a5)...

Abstract

As the characteristic length scale of electronic devices shrinks, so does the required scale for measurement techniques to provide useful feedback during development and fabrication. The current capabilities of atom probe tomography (APT), such as detecting a low number of dopant atoms in nanoscale devices or studying diffusion effects in a nanowire (NW), make this technique important for metrology on the nanoscale. Here we review recent APT investigations applied to transistors (including regions such as gate oxide, channel, source, drain, contacts, etc.), heterogeneous dopant incorporation in NWs, and Pt-based nanoparticles.

Copyright

References

Hide All
1.International Technology Roadmap for Semiconductors: Metrology Summary, http://www.itrs.net.
2.Colinge, J.-P., FinFET and Other Multi-Gate Transistors (Springer, New York, 2008).
3.Mayberry, M., “Pushing beyond the Frontiers of Technology,” in Frontiers of Charactacterization for Metrology in Nanoelectronics, Secula, E.M., Seiler, D.G., Eds. (NIST, Gaithersburg, MD 2013), p. 21.
4.Theis, T., “Metrology for a Post-CMOS World: An Overview,” in Frontiers of Charactacterization for Metrology in Nanoelectronics, Secula, E.M., Seiler, D.G., Eds. (NIST, Gaithersburg, MD 2013), p. 237.
5.Müller, E.W., Panitz, J.A., McLane, S.B., Rev. Sci. Instrum. 39, 83 (1968).
6.Miller, M.K., Cerezo, A., Hetherington, M.G., Smith, G.D.W., Atom Probe Field Ion Microscopy (Oxford University Press, Oxford, 1996).
7.Gault, B., Moody, M.P., Cairney, J.M., Ringer, S.P., Atom Probe Microscopy (Springer, New York, 2012).
8.Larson, D.J., Prosa, T.J., Ulfig, R.M., Geiser, B.P., Kelly, T.F., Local Electrode Tomography: A User’s Guide (Springer, New York, 2013).
9.Miller, M.K., Forbes, R.G., Atom-Probe Tomography: The Local Electrode Atom Probe (Springer, New York, 2014).
10.Inoue, K., Yano, F., Nishida, A., Takamizawa, H., Tsunomura, T., Nagai, Y., Hasegawa, M., Ultramicroscopy 109, 1479 (2009).
11.Inoue, K., Kambham, A.K., Mangelinck, D., Lawrence, D., Larson, D.J., Microsc. Today 20, 38 (2012).
12.Inoue, K., Yano, F., Nishida, A., Takamizawa, H., Tsunomura, T., Nagai, Y., Hasegawa, M., Appl. Phys. Lett. 95, 043502 (2009).
13.Takamizawa, H., Shimizu, Y., Inoue, K., Toyama, T., Okada, N., Kato, M., Uchida, H., Yano, F., Nishida, A., Mogami, T., Nagai, Y., Appl. Phys. Lett. 99, 133502 (2011).
14.Takamizawa, H., Shimizu, Y., Inoue, K., Toyama, T., Yano, F., Nishida, A., Mogami, T., Okada, N., Kato, M., Uchida, H., Kitamoto, K., Miyagi, T., Kato, J., Nagai, Y., Appl. Phys. Lett. 100, 253504 (2012).
15.Gilbert, M., Vandervorst, W., Koelling, S., Kambham, A.K., Ultramicroscopy 111, 530 (2011).
16.Inoue, K., Takamizawa, H., Kitamoto, K., Kato, J., Miyagi, T., Nakagawa, Y., Kawasaki, N., Sugiyama, N., Hashimoto, H., Shimizu, Y., Toyama, T., Nagai, Y., Karen, A., Appl. Phys. Express 4, 116601 (2011).
17.Mutas, S., Klein, C., Gerstl, S.S.A., Ultramicroscopy 111, 546 (2011).
18.Martinez, E., Ronsheim, P., Barnes, J.-P., Rochat, N., Py, M., Hatzistergos, M., Renault, O., Silly, M., Sirotti, F., Bertin, F., Gambacorti, N., Microelectron. Eng. 88, 1349 (2011).
19.Izumida, T., Okano, K., Kanemura, T., Kondo, M., Inaba, S., Itoh, S., Aoki, N., Toyoshima, Y., Jpn. J. Appl. Phys. 50, 04DC15 (2011).
20Kambham, A.K., Mody, J., Gilbert, M., Koelling, S., Vandervorst, W., Ultramicroscopy 111, 535 (2011).
21.Takamizawa, H., Shimizu, Y., Nozawa, Y., Toyama, T., Morita, H., Yabuuchi, Y., Ogura, M., Nagai, Y., Appl. Phys. Lett. 100, 093502 (2012).
22.Hatzistergos, M.S., Hopstaken, M., Kim, E., Vanamurthy, L., Shaffer, J.F., Microsc. Microanal. 19, 960 (2013).
23.Kambham, A.K., Kumar, A., Gilbert, M., Vandervorst, W., Ultramicroscopy 132, 65 (2013).
24.Kambham, A.K., Kumar, A., Florakis, A., Vandervorst, W., Nanotechnology 24, 275705 (2013).
25.Vandervorst, W., Schulze, A., Kambham, A.K., Mody, J., Gilbert, M., Eyben, P., Phys. Status Solidi C 11, 121 (2014).
26.Lavoie, C., d’Heurle, F., Detavernier, C., Cabral, C., Microelectron. Eng. 70, 144 (2003).
27.Mangelinck, D., Dai, J.Y., Pan, J., Lahiri, S.K., Appl. Phys. Lett. 75, 1736 (1999).
28.Lee, P., Pey, K., Mangelinck, D., Ding, J., Chi, D., Chan, L., IEEE Electron Device Lett. 22, 568 (2001).
29.Mangelinck, D., Hoummada, K., Portavoce, A., Perrin, C., Daineche, R., Descoins, M., Larson, D.J., Clifton, P.H., Scr. Mater. 62, 568 (2010).
30.Cojocaru-Miredin, O., Mangelinck, D., Hoummada, K., Cadel, E., Blavette, D., Deconihout, B., Perrin-Pellegrino, C., Scr. Mater. 57, 373 (2007).
31.Panciera, F., Hoummada, K., Gregoire, M., Juhel, M., Bicais, N., Mangelinck, D., Appl. Phys. Lett. 99, 051911 (2011).
32.Chen, L.J., JOM 57, 24 (2005).
33.Panciera, F., Hoummada, K., Gregoire, M., Juhel, M., Mangelinck, D., Microelectron. Eng. 107, 173 (2013).
34.Perea, D.E., Hemesath, E.R., Schwalbach, E.J., Lensch-Falk, J.L., Voorhees, P.W., Lauhon, L.J., Nat. Nanotechnol. 4, 315 (2009).
35.Connell, J.G., Yoon, K., Perea, D.E., Schwalbach, E.J., Voorhees, P.W., Lauhon, L.J., Nano Lett. 13, 199 (2013).
36.Moutanabbir, O., Isheim, D., Blumtritt, H., Senz, S., Pippel, E., Seidman, D.N., Nature 496, 78 (2013).
37.Hosokawa, M., Nogi, K., Naito, M., Yokoyama, T., Nanoparticle Technology Handbook (Elsevier, Philadelphia, 2012).
38.Gordon, L.M., Cohen, M.J., Joester, D., Microsc. Microanal. 19, 952 (2013).
39.Felfer, P., Benndorf, P., Masters, A., Maschmeyer, T., Cairney, J.M., Angew. Chem. Int. Ed. 53, 11190 (2014).
40.Heck, P.R., Stadermann, F.J., Isheim, D., Auciello, O., Daulton, T.L., Davis, A.M., Elam, J.W., Floss, C., Hiller, J., Larson, D.J., Lewis, J.B., Mane, A., Pellin, M.J., Savina, M.R., Seidman, D.N., Stephan, T., Meteorit. Planet. Sci. 49, 453 (2014).
41.Larson, D.J., Giddings, A.D., Wu, Y., Verheijen, M.A., Prosa, T.J., Roozeboom, F., Rice, K.P., Kessels, W.M.M., Geiser, B.P., Kelly, T.F., Ultramicroscopy 159, 420 (2015).
42.Felfer, P., Li, T., Eder, K., Galinski, H., Magyar, A.P., Bell, D.C., Smith, G.D.W., Kruse, N., Ringer, S.P., Cairney, J.M., Ultramicroscopy 159, 413 (2015).
43.George, S.M., Chem. Rev. 110, 111 (2010).

Keywords

Atom probe tomography of nanoscale electronic materials

  • D.J. Larson (a1), T.J. Prosa (a2), D.E. Perea (a3), K. Inoue (a4) and D. Mangelinck (a5)...

Metrics

Altmetric attention score

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed