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Subwavelength Grating Structure with High Aspect Ratio and Tapered Sidewall Profiles

  • W. Yu (a1), D. Wu (a1), X. Duan (a2) and Y. Yi (a1) (a2)


CMOS-compatible fabrication and etching processes are often used in subwavelength grating structures manufacturing, it normally generates tapered sidewall profile of the gratings. In this work, we have studied the impacts on resonance mode characteristics of subwavelength grating structures due to the tapered sidewall profile, as well as grating with high aspect ratio. Our simulation results have revealed that both of these two factors play important roles on the resonance mode behavior of subwavelength grating devices. We also discussed the mechanism between the guided mode resonance and the grating cavity mode resonance. Our study will provide guidance for a series of integrated photonics devices applications, such as compact optical filter, photonics amplifier, and lasers, while the realistic subwavelength grating structure is considered.


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[1] Hessel, A. and Oliner, A. A., “A new theory of Wood’s anomalies on optical gratings,” Appl. Opt., vol. 4, no. 10, pp. 12751297, Oct. 1965.
[2] Wang, S. S., Magnusson, R., Bagby, J. S., and Moharam, M. G., “Guided- mode resonances in planar dielectric-layer diffraction gratings,” J. Opt. Soc. Amer. A, vol. 7, no. 8, pp. 14701474, Aug. 1990.
[3] Chang-Hasnain, C. J. and Yang, W., “High-contrast gratings for inte- grated optoelectronics,” Adv. Opt. Photon., vol. 4, no. 3, pp. 379440, Sep. 2012.
[4] Mateus, C. F. R., Huang, M. C. Y., Deng, Y., Neureuther, A. R., and Chang-Hasnain, C. J., “Ultrabroadband mirror using low-index cladded subwavelength grating,” IEEE Photon. Technol. Lett., vol. 16, no. 2, pp. 518520, Feb. 2004.
[5] Sturmberg, B. C. P., Dossou, K. B., Botten, L. C., McPhedran, R. C., and de Sterke, C. M., Opt. Exp., 23, A1672 (2015)
[6] Liu, Z. S., Tibuleac, S., Shin, D., Young, P. P., and Magnusson, R., “High- efficiency guided-mode resonance filter,” Opt. Lett., vol. 23, no. 19, pp. 15561558, Oct. 1998.
[7] Szeghalmi, A., Kley, E. B., and Knez, M., “Theoretical and experimental analysis of the sensitivity of guided mode resonance sensors,” J. Phys. Chem. C, vol. 114, no. 49, pp. 2115021157, Dec. 2010.
[8] Lin, S. F. et al. , “A model for fast predicting and optimizing the sensitiv- ity of surface-relief guided mode resonance sensors,” Sens. Actuators B, Chem., vol. 176, no. 1, pp. 11971203, Jan. 2013.
[9] Zhu, A. Y., Zhu, S., and Lo, G.-Q., “Guided mode resonance enabled ultra-compact germanium photodetector for 1.55 μm detection,” Opt. Exp., vol. 22, no. 3, pp. 22472258, Feb. 2014.
[10] Lin, Y.-R., Lai, K. Y., Wang, H.-P., and He, J.-H., “Slope-tunable Si nanorod arrays with enhanced antireflection and self-cleaning proper- ties,” Nanoscale, vol. 2, no. 12, pp. 27652768, Dec. 2010.
[11] Wang, Y. et al. , “Biomimetic corrugated silicon nanocone arrays for self- cleaning antireflection coatings,” Nano Res., vol. 3, no. 7, pp. 520527, Jul. 2010.
[12] Crozier, K. B., Sundaramurthy, A., Kino, G. S., and Quate, C. F., “Optical antennas: Resonators for local field enhancement,” J. Appl. Phys., vol. 94, no. 7, pp. 46324642, Oct. 2003.
[13] Kabashin, A. V. et al. , “Plasmonic nanorod metamaterials for biosens- ing,” Nature Mater., vol. 8, no. 11, pp. 867871, Oct. 2009.



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