Skip to main content Accessibility help
×
Home

Study of the Structure, Electrical Conductivity of Cr-Cu Thin-Film Composition on a Glass Substrate

  • Sergey M. Karabanov (a1)

Abstract

Cu films are widely used in electronics for interconnections. In some applications, reliable thin-film connecting elements having high electrical conductivity, mechanical stability and adhesion to a glass substrate are required. In this case the length of the elements amounts to tens of centimetres. In this paper, Cu was used as the basis for the connecting elements. To ensure high adhesion Cr was used as an underlayer. The paper investigates the structure, electrical conductivity, adhesion, defect formation of Cu, Cu-Cr, Cr-Cu-Cr thin-film conductors. As a result of the performed research, the regularities of changes of the film structure, electrical conductivity, adhesion, defect formation depending on the technological process parameters were established. Physical and technological mechanisms determining the observed patterns are considered. The research results are used in the device production technology.

Copyright

Corresponding author

References

Hide All
[1]VLSI Technology (SZE, S.M., New Jersey, 1983).
[2]Handbook of Thin Film Technology (I, Leon. Maissel and Reinhard Glang, McCraw Hill Hook Company, 1970).
[3]Karabanov, S.M., PhD. Thesis, Ryazan State Radio Engineering University, 1984.
[4]Cherepnin, N.V., Vacuum Properties of Materials (Soviet radio, Moscow, 1968).
[5]Kurov, G.A. and Zhilkov, E.A., Diffuse porosity in thin films. Works on problems of microelectronics (Moscow, 1972) 12, pp. 90-104.

Keywords

Study of the Structure, Electrical Conductivity of Cr-Cu Thin-Film Composition on a Glass Substrate

  • Sergey M. Karabanov (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed