Skip to main content Accessibility help

Exponential Conductivity Increase in Strained MoS2 via MEMS Actuation

  • A. Vidana (a1), S. Almeida (a2), M. Martinez (a1), E. Acosta (a1), J. Mireles (a3), T. –J. King (a2) and D. Zubia (a1)...


In this work, a poly-Si0.35Ge0.65 microelectromechanical systems (MEMS)- based actuator was designed and fabricated using a CMOS compatible standard process to specifically strain a bi-layered (2L) MoS2 flake and measure its electrical properties. Experimental results of the MEMS-TMDC device show an increase of conductivity up to three orders of magnitude by means of vertical actuation using the substrate as the body terminal. A force balance model of the MEMS-TMDC was used to determine the amount of strain induced in the MoS2 flake. Strains as high as 3.3% is reported using the model fitted to the experimental data.


Corresponding author


Hide All
1.Chhowalla, M., Liu, Z. F. and Zhang, H., Chem. Soc. Rev, 44, 2584-2586,(2015).
2.Bertolazzi, S., Brivio, J. and Kis, A., ACS nano, 5, (12), 9703-9709, (2011).
3.Almeida, S. F., Zubia, D., Vidaña, A. I. and Martinez, M., Berkeley Symposium on Energy Efficient Electronic Systems & Steep Transistors Workshop (E3S), Fifth Edition, (2017).
4.Guo, H., Lu, N., Wu, X. and Zeng, X. C., The Journal of Physical Chemistry, 118(13), 72427249, (2014).
5.He, K., Poole, C., Mak, K. F. and Shan, J., Nano letters, 13 (6), 2931-2936, (2013).
6.Johari, P. and Shenoy, V. B., ACS NANO, 6 (6), 54495456, (2012).
7.Manzeli, S., Allain, A., Ghadimi, A. and Kis, A., Nano letters, 15 (8), 5330-5335, (2015).
8.Tsai, M.-Y., Tarasov, A., Hesabit, Z. R., Taghinejad, H., Campbell, P. M., Joinert, C. A., Adibi, A. and Vogel, E. M., ACS Applied Materials & Interfaces, 7 (23), 12850-12855, (2015).
9.Lee, J., Wang, Z., He, K., Shan, J. and Feng, P. X.-L., ACS Nano, 7 (7), 6086-6091, (2013).
10.Vidana, A., Zubia, D., Martinez, M., Acosta, E., Mireles, J. J., King, T.-J. and Almeida, S., IOP Semiconductor Science and Technology, 34 (4), 1-8, (2019).
11.Yu, S., Xiong, H. D., Eshun, K., Yuan, H. and Li, Q., Applied Surface Science, 325, 27-32, (2015).



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed