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Effect of Compound Dielectric and Metal Thinning on Metal-Insulator-Metal Resonant Absorbers for Multispectral Infrared Air-Bridge Bolometers

  • Robert E. Peale (a1), Seth Calhoun (a1), Chris J. Fredricksen (a1), Evan Smith (a2) (a3), Shiva Vangala (a2) (a4), Kevin Leedy (a2), Joshua R. Hendrickson (a2) and Justin W. Cleary (a2)...

Abstract

Addition of wavelength selective absorbers on microbolometers tends to increase their thermal mass and slow their infrared response times. Making the bolometric material an integral part of the absorber and minimizing layer thicknesses is one possible way to maintain high detector speeds. Here, we study experimentally the effect on permittivity of adding a layer of semiconducting VOx between two layers of SiO2. Additionally, we investigate theoretically the effect on resonance wavelength of thinning the metal in metal-insulator-metal plasmonic resonant absorbers.

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Effect of Compound Dielectric and Metal Thinning on Metal-Insulator-Metal Resonant Absorbers for Multispectral Infrared Air-Bridge Bolometers

  • Robert E. Peale (a1), Seth Calhoun (a1), Chris J. Fredricksen (a1), Evan Smith (a2) (a3), Shiva Vangala (a2) (a4), Kevin Leedy (a2), Joshua R. Hendrickson (a2) and Justin W. Cleary (a2)...

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