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Direct Fractographic Evaluation of Multilayer CNx/TiN Films by Magnetron Sputtering

Published online by Cambridge University Press:  02 January 2018

Gongsheng Song ,
Qiang Fu  and
Chunxu Pan
Gongsheng Song
Affiliation:
Suzhou Institute of Wuhan University, Suzhou, 215123, China School of Physics and Technology, Wuhan University, Wuhan, 430072, China
Qiang Fu
Affiliation:
School of Physics and Technology, Wuhan University, Wuhan, 430072, China
Chunxu Pan*
Affiliation:
Suzhou Institute of Wuhan University, Suzhou, 215123, China School of Physics and Technology, Wuhan University, Wuhan, 430072, China
*
*(Email: cxpan@whu.edu.cn; 823804390@qq.com)
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Abstract

In this paper, a multilayer CNx/TiN composite film on high-speed steel substrate was prepared by using a multi-arc assisted DC reactive magnetron sputtering system. The cross-section observations of the fracture surface reveal that the films show a pure cleavage fracture due to its super-high hardness, and the interfacial strength between the film and substrate is associates with the film thickness, i.e., 2μm is a critical thickness for the present deposition. That is to say, there is no disbonding or cracking at the interface when the film thickness is less than 2μm, while the interfacial failure is generated if the film thickness is larger than 2μm. This direct SEM observation of the fracture surface provides a distinct image for evaluating the mechanical property and also analyzing the failure mechanism of the films.

Keywords

fractureadhesionthin film
Type
Articles
Information
MRS Advances , Volume 3 , Issue 18: Processing and Manufacturing , 2018 , pp. 949 - 955
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Copyright
Copyright © Materials Research Society 2017 

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