Skip to main content Accessibility help
×
Home

Development of All-Diamond Scanning Probes Based on Faraday Cage Angled Etching Techniques

  • C. Giese (a1), P. Quellmalz (a1) and P. Knittel (a1)

Abstract

We are proposing a novel fabrication method for single crystal diamond scanning probes for atomic force microscopy (AFM), exploiting Faraday cage angled etching (FCAE). Common, oxygen-based, inductively coupled plasma (ICP) dry etching processes for diamond are limited with respect to the achievable geometries. The fabrication of freestanding micro- and nanostructures is therefore challenging. This is a major disadvantage for several application fields e.g., for realizing scanning magnetometry probes based on nitrogen vacancy (NV) centres and capable of measuring magnetic fields at the nanoscale. Combining a planar design with FCAE and state-of-the-art electron beam lithography (EBL) yields a reduction of process complexity and cost compared to the established fabrication technology of micro-opto-mechanical diamond devices. Here, we report on the direct comparison of both approaches and present first proof-of-concept planar-FCAE-prototypes for scanning probe applications.

Copyright

Corresponding author

References

Hide All
[1]Balmer, R. S., Brandon, J. R., Clewes, S. L., Dhillon, H. K., Dodson, J. M., Friel, I., Inglis, P. N., Madgwick, T. D., Markham, M. L., Mollart, T. P., Perkins, N., Scarsbrook, G. A., Twitchen, D. J., Whitehead, A. J., Wilman, J. J., Woollard, S. M., Journal of physics. Condensed matter an Institute of Physics journal 2009, 21, 364221.
[2]Koizumi, S., Nebel, C., Nesladek, M., Physics and Applications of CVD Diamond, Wiley 2008.
[3]Nebel, C. E., in Nanodiamonds Micro and Nano Technologies (Ed.: Arnault, J.-C.), Elsevier 2017, p. 1.
[4]Aharonovich, I., Greentree, A. D., Prawer, S., Nature Photon 2011, 5, 397.
[5]Balasubramanian, G., Chan, I. Y., Kolesov, R., Al-Hmoud, M., Tisler, J., Shin, C., Kim, C., Wojcik, A., Hemmer, P. R., Krueger, A., Hanke, T., Leitenstorfer, A., Bratschitsch, R., Jelezko, F., Wrachtrup, J., Nature 2008, 455, 648.
[6]Balasubramanian, G., Neumann, P., Twitchen, D., Markham, M., Kolesov, R., Mizuochi, N., Isoya, J., Achard, J., Beck, J., Tissler, J., Jacques, V., Hemmer, P. R., Jelezko, F., Wrachtrup, J., Nature materials 2009, 8, 383.
[7]Gruber, A., Science 1997, 276, 2012.
[8]Hanson, R., Awschalom, D. D., Nature 2008, 453, 1043.
[9]Aharonovich, I., Babinec, T., in Comprehensive hard materials: Volume 1-3: Hardmetals, ceramics, super hard materials (Eds.: Nebel, C. E., Mari, D., LLanes, L., Sarin, V. K.), Elsevier. Amsterdam, Waltham, Heidelberg 2014, p. 469.
[10]Berman, G. P., Bishop, A. R., Chernobrod, B. M., Hawley, M. E., Brown, G. W., Tsifrinovich, V. I., J. Phys.: Conf. Ser. 2006, 38, 167.
[11]Degen, C. L., Appl. Phys. Lett. 2008, 92, 243111.
[12]Maze, J. R., Stanwix, P. L., Hodges, J. S., Hong, S., Taylor, J. M., Cappellaro, P., Jiang, L., Dutt, M. V. G., Togan, E., Zibrov, A. S., Yacoby, A., Walsworth, R. L., Lukin, M. D., Nature 2008, 455, 644.
[13]Appel, P., Neu, E., Ganzhorn, M., Barfuss, A., Batzer, M., Gratz, M., Tschöpe, A., Maletinsky, P., The Review of scientific instruments 2016, 87, 63703.
[14]Maletinsky, P., Hong, S., Grinolds, M. S., Hausmann, B., Lukin, M. D., Walsworth, R. L., Loncar, M., Yacoby, A., Nature nanotechnology 2012, 7, 320.
[15]Zhou, T. X., Stöhr, R. and Yacoby, A., Appl. Phys. Lett. 2017 , 111, 163106
[16]Burek, M. J., de Leon, N. P., Shields, B. J., Hausmann, B. J. M., Chu, Y., Quan, Q., Zibrov, A. S., Park, H., Lukin, M. D., Lončar, M., Nano letters 2012, 12, 6084.
[17]Burek, M. J., Chu, Y., Liddy, M. S. Z., Patel, P., Rochman, J., Meesala, S., Hong, W., Quan, Q., Lukin, M. D., Lončar, M., Nature communications 2014, 5, 5718.
[18]Latawiec, P., Burek, M. J., Sohn, Y.-I., Lončar, M., Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2016, 34, 41801.
[19]Widmann, C. J.; Giese, C.; Wolfer, M.; Brink, D.; Heidrich, N.; Nebel, C. E., Diamond and Related Materials 2016 54, S. 2–8.
[20]Wasa, K., in Handbook of Sputtering Technology, Elsevier 2012, p. 41.
[21]Tao, Y., Degen, C., Advanced materials (Deerfield Beach, Fla.) 2013, 25, 3962.
[22]Challier, M., Sonusen, S., Barfuss, A., Rohner, D., Riedel, D., Koelbl, J., Ganzhorn, M., Appel, P., Maletinsky, P., Neu, E., Micromachines 2018, 9, 148.
[23]Savenko, A., Yildiz, I., Petersen, D. H., Bøggild, P., Bartenwerfer, M., Krohs, F., Oliva, M., Harzendorf, T., Nanotechnology 2013, 24, 465701.
[24]Yacoot, A., Koenders, L., New J. Phys. 2008, 41, 103001.
[25]Knittel, P., Hibst, N., Mizaikoff, B., Strehle, S., Kranz, C., Ultramicroscopy 2017, 179, 24-32.
[26]Tao, Y., Boss, J. M., Moores, B. A., Degen, C. L., Nat Commun, 5, 1.
[27]Ovartchaiyapong, P., Pascal, L. M. A., Myers, B. A., Lauria, P., Bleszynski Jayich, A. C., Appl. Phys. Lett. 2012, 101, 163505.
[28]Rath, P., Khasminskaya, S., Nebel, C., Wild, C., Pernice, W. H. P., Nature communications 2013, 4, 1690.

Keywords

Development of All-Diamond Scanning Probes Based on Faraday Cage Angled Etching Techniques

  • C. Giese (a1), P. Quellmalz (a1) and P. Knittel (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.