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Optical Photothermal Infrared Microspectroscopy with Simultaneous Raman – A New Non-Contact Failure Analysis Technique for Identification of <10 μm Organic Contamination in the Hard Drive and other Electronics Industries

  • Mustafa Kansiz (a1), Craig Prater (a1), Eoghan Dillon (a1), Michael Lo (a1), Jay Anderson (a1), Curtis Marcott (a2), Abel Demissie (a3), Yanling Chen (a3) and Gary Kunkel (a3)...

Abstract

Optical Photothermal Infrared (O-PTIR) spectroscopy is a new technique for measuring submicron spatial resolution IR spectra with little or no sample preparation. This speeds up analysis times benefiting high-volume manufacturers through gaining insight into process contamination that occurs during development and on production lines. The ability to rapidly obtain far-field non-contact IR spectra at high spatial resolution facilitates the chemical identification of small organic contaminants that are not possible to measure with conventional Fourier transform infrared (FT-IR) microspectroscopy. The unique pump-probe system architecture also facilitates submicron simultaneous IR + Raman microscopy from the same spot with the same spatial resolution. With these unique capabilities, O-PTIR is finding utilization in the high-volume and high-value industries of high-tech componentry (memory storage, electronics, displays, etc.).

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References

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Keywords

Optical Photothermal Infrared Microspectroscopy with Simultaneous Raman – A New Non-Contact Failure Analysis Technique for Identification of <10 μm Organic Contamination in the Hard Drive and other Electronics Industries

  • Mustafa Kansiz (a1), Craig Prater (a1), Eoghan Dillon (a1), Michael Lo (a1), Jay Anderson (a1), Curtis Marcott (a2), Abel Demissie (a3), Yanling Chen (a3) and Gary Kunkel (a3)...

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