Skip to main content Accessibility help
×
Home

NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams

  • Sybren Sijbrandij (a1), Alexander Lombardi (a1), Alain Sireuil (a1), Fouzia Khanom (a1), Brett Lewis (a1), Christelle Guillermier (a1), Doug Runt (a1) and John Notte (a1)...

Abstract

By combining a focused inert-gas ion beam instrument and a custom magnetic-sector mass spectrometer, high spatial resolution imaging and chemical analysis are provided within a single instrument. Sub-nanometer image resolution is achieved by secondary electron (SE) imaging, limited only by the probe-size of the primary beam, while the spatial resolution for chemical mapping obtained via secondary ion mass spectrometry (SIMS) is limited mainly by beam-sample interactions to about 10 nm. This article introduces the background behind this development, describes the instrument and its various operating modes, and presents examples of its applications.

  • View HTML
    • Send article to Kindle

      To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

      Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

      Find out more about the Kindle Personal Document Service.

      NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams
      Available formats
      ×

      Send article to Dropbox

      To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

      NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams
      Available formats
      ×

      Send article to Google Drive

      To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

      NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams
      Available formats
      ×

Copyright

Corresponding author

References

Hide All
[1]Ward, BW et al. , J Vac Sci & Tech B 24 (2006) 2871–74.
[2]Morgan, J et al. , Microscopy Today 14(4) (2006) 2431.
[3]Hlawacek, G and Gölzhäuser, A, Helium Ion Microscopy, Springer, Basel, Switzerland, 2016.
[4]Sijbrandij, S et al. , J Vac Sci Tech B 28(1) (2010) 7377.
[5]Rahman, FWM et al. , Scanning 33 (2011) 16.
[6]Notte, JA, Microscopy Today 20(5) (2012) 1622.
[7]Stanford, MG et al. , J Vac Sci & Tech B 35 (3) (2017) 030802 123.
[8]Wirtz, T et al. , Appl Phys Lett 101 (2012) 041601 15.
[9]Wirtz, T et al. , “SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics” in Helium Ion Microscopy, eds. Hlawacek, G and Gölzhäuser, A, Springer, Basel, Switzerland, 2016, pp. 297323.
[10]Dowsett, D and Wirtz, T, Anal Chem 89 (2017) 8957–65.
[11]Sijbrandij, S et al. , J Vac Sci Tech B 2(6) (2010) C6F6C6F9.
[12]Hoppe, P et al. , Geostand Geoanal Res 37(2) (2013) 111–54.
[13]Senoner, M et al. , Anal Bioanal Chem 407(11) (2015) 3211–217.
[14]Gayle, FW and Goodway, M, Science 266(5187) (1994) 1015–17.

Keywords

NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams

  • Sybren Sijbrandij (a1), Alexander Lombardi (a1), Alain Sireuil (a1), Fouzia Khanom (a1), Brett Lewis (a1), Christelle Guillermier (a1), Doug Runt (a1) and John Notte (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed